| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Amorphous structures of buried oxide in SiC-on-insulator
|
Ishimaru, Manabu
|
|
2001
|
30 |
12 |
p. 1489-1492
|
artikel
|
| 2 |
Anomalous scaling effect of tungsten/titanium nitride/titanium to silicon electrical contact resistance for subquarter micron microelectronic devices
|
Choy, Jun-Ho
|
|
2001
|
30 |
12 |
p. 1609-1615
|
artikel
|
| 3 |
A review: Thermal processing in fast ramp furnaces
|
Roy, Pradip K.
|
|
2001
|
30 |
12 |
p. 1578-1583
|
artikel
|
| 4 |
Combined low-frequency noise and resistance measurements for void extraction in deep-submicrometer interconnects
|
Chu, L. W.
|
|
2001
|
30 |
12 |
p. 1513-1519
|
artikel
|
| 5 |
Dishing and nitride erosion of STI-CMP for different integration schemes
|
Hwee, Lim Lim
|
|
2001
|
30 |
12 |
p. 1478-1482
|
artikel
|
| 6 |
Effect of annealing on the surface microstructural evolution and the electromigration reliability of electroplated Cu films
|
Kang, S. H.
|
|
2001
|
30 |
12 |
p. 1506-1512
|
artikel
|
| 7 |
Effect of via etching process and postclean treatment on via electrical performance
|
Ho, Chiew Nyuk
|
|
2001
|
30 |
12 |
p. 1595-1601
|
artikel
|
| 8 |
Effects of deposition conditions of Al and Ti underlayer on electromigration reliability for deep-submicron interconnect metallization
|
Park, Y. B.
|
|
2001
|
30 |
12 |
p. 1569-1577
|
artikel
|
| 9 |
Electrical properties of Ru and RuO2 gate electrodes for Si-PMOSFET with ZrO2 and Zr-silicate dielectrics
|
Zhong, Huicai
|
|
2001
|
30 |
12 |
p. 1493-1498
|
artikel
|
| 10 |
Electrochemical schottky characteristics of ZnO for capacitance-voltage measurements
|
Stutz, C. E.
|
|
2001
|
30 |
12 |
p. L40-L42
|
artikel
|
| 11 |
Foreword
|
Ravindra, N. M.
|
|
2001
|
30 |
12 |
p. 1477
|
artikel
|
| 12 |
Laser-induced titanium disilicide formation for submicron technologies
|
Chong, Y. F.
|
|
2001
|
30 |
12 |
p. 1549-1553
|
artikel
|
| 13 |
Mechanism of hemispherical-grained Si formation for dynamic random access memory cells by rapid thermal chemical vapor deposition
|
Berger, S.
|
|
2001
|
30 |
12 |
p. 1532-1536
|
artikel
|
| 14 |
N and P metal oxide semiconductor field effect transistor characteristics of hafnium-doped SiO2 gate dielectrics
|
Misra, Veena
|
|
2001
|
30 |
12 |
p. 1499-1505
|
artikel
|
| 15 |
Nano-indentation studies of xerogel and SiLK low-K dielectric materials
|
Sikder, A. K.
|
|
2001
|
30 |
12 |
p. 1527-1531
|
artikel
|
| 16 |
Nickel silicide as a contact material for submicron CMOS devices
|
Chi, D. Z.
|
|
2001
|
30 |
12 |
p. 1483-1488
|
artikel
|
| 17 |
Nickel silicide formation on Si(100) and Poly-Si with a presilicide N2+ implantation
|
Lee, P. S.
|
|
2001
|
30 |
12 |
p. 1554-1559
|
artikel
|
| 18 |
Optimization of tribological properties of silicon dioxide during the chemical mechanical planarization process
|
Sikder, A. K.
|
|
2001
|
30 |
12 |
p. 1520-1526
|
artikel
|
| 19 |
Pattern density and deposition profile effects on oxide chemical-mechanical polishing and chip-level modeling
|
Park, Y. B.
|
|
2001
|
30 |
12 |
p. 1560-1568
|
artikel
|
| 20 |
Plastic deformation and interfacial sliding in Al and Cu thin film: Si substrate systems due to thermal cycling
|
Dutta, I.
|
|
2001
|
30 |
12 |
p. 1537-1548
|
artikel
|
| 21 |
Processing of Ta2O5 powders for electronic applications
|
Singh, RAJ P.
|
|
2001
|
30 |
12 |
p. 1584-1594
|
artikel
|
| 22 |
Relaxed silicon-germanium on insulator substrate by layer transfer
|
Cheng, Zhiyuan
|
|
2001
|
30 |
12 |
p. L37-L39
|
artikel
|
| 23 |
“Seedless” electrochemical deposition of copper on physical vapor deposition-W2N liner materials for ultra large scale integration (ULSI) devices
|
Shaw, Michael J.
|
|
2001
|
30 |
12 |
p. 1602-1608
|
artikel
|
| 24 |
Silicon device processing in H-ambients: H-diffusion mechanisms and influence on electronic properties
|
Sopori, Bhushan
|
|
2001
|
30 |
12 |
p. 1616-1627
|
artikel
|
| 25 |
Silicon device processing in H-ambients: H-diffusion mechanisms and influence on electronic properties
|
Sopori, Bhushan
|
|
|
30 |
12 |
p. 1616-1627
|
artikel
|
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