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                                       Details for article 25 of 25 found articles
 
 
  Silicon device processing in H-ambients: H-diffusion mechanisms and influence on electronic properties
 
 
Title: Silicon device processing in H-ambients: H-diffusion mechanisms and influence on electronic properties
Author: Sopori, Bhushan
Zhang, Yi
Ravindra, N. M.
Appeared in: Journal of electronic materials
Paging: Volume 30 () nr. 12 pages 1616-1627
Year: 2001-06-23
Contents:
Publisher: Springer-Verlag, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 25 of 25 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands