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Journal description
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Details for article 15 of 25 found articles
| Title: |
Nano-indentation studies of xerogel and SiLK low-K dielectric materials |
| Author: |
Sikder, A. K. Irfan, I. M. Kumar, Ashok Anthony, J. M. |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 30 (2001) nr. 12 pages 1527-1531 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Springer-Verlag, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 25 found articles
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