nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
Analysis of hydrophile process of a polymer surface with an inverter plasma
|
Murakami, Nariaki |
|
2001 |
136 |
1-3 |
p. 265-268 4 p. |
artikel |
2 |
A new method to build a high-voltage pulse supply using only semiconductor switches for plasma-immersion ion implantation
|
Redondo, L.M |
|
2001 |
136 |
1-3 |
p. 51-54 4 p. |
artikel |
3 |
A plasma immersion implantation system for materials modification
|
Current, Michael I |
|
2001 |
136 |
1-3 |
p. 138-141 4 p. |
artikel |
4 |
Applications of plasma immersion ion implantation in microelectronics — a brief review
|
Chu, Paul K. |
|
2001 |
136 |
1-3 |
p. 151-156 6 p. |
artikel |
5 |
Basic investigations of an integrated modulator for plasma immersion ion implantation
|
Günzel, R |
|
2001 |
136 |
1-3 |
p. 47-50 4 p. |
artikel |
6 |
Characteristics of BF3 plasma-doped gate/source/drain for 0.18-μm pMOSFETs
|
Ha, Jung-Min |
|
2001 |
136 |
1-3 |
p. 157-161 5 p. |
artikel |
7 |
Combined deposition and implantation in the cathodic arc for thick film preparation
|
Tarrant, R.N |
|
2001 |
136 |
1-3 |
p. 188-191 4 p. |
artikel |
8 |
Corrosion resistance of TiN coatings produced by various dry processes
|
Morita, Ryuhei |
|
2001 |
136 |
1-3 |
p. 207-210 4 p. |
artikel |
9 |
Determination of heat and ion fluxes in plasma immersion ion implantation by in situ measurement of temperature using laser interferometry
|
Takaki, K |
|
2001 |
136 |
1-3 |
p. 261-264 4 p. |
artikel |
10 |
Development of hybrid pulse plasma coating system
|
Sakudo, N |
|
2001 |
136 |
1-3 |
p. 23-27 5 p. |
artikel |
11 |
Development of internal-antenna-driven large-volume RF plasma sources for plasma-based ion implantation
|
Setsuhara, Yuichi |
|
2001 |
136 |
1-3 |
p. 60-64 5 p. |
artikel |
12 |
Development of plasma-based ion implantation (PBII) techniques at Osaka National Research Institute (ONRI)
|
Chun, Sung-Yong |
|
2001 |
136 |
1-3 |
p. 32-35 4 p. |
artikel |
13 |
DLC films formed by hybrid pulse plasma coating (HPPC) system
|
Awazu, K |
|
2001 |
136 |
1-3 |
p. 172-175 4 p. |
artikel |
14 |
Dynamic MC simulations of diamond-like carbon film synthesis by plasma-based ion implantation
|
Miyagawa, Y |
|
2001 |
136 |
1-3 |
p. 122-126 5 p. |
artikel |
15 |
Effects of carbon ion pre-implantation on the mechanical properties of ta-C coatings on Ti-6Al-4V
|
Tong, H.H |
|
2001 |
136 |
1-3 |
p. 211-216 6 p. |
artikel |
16 |
Energy distribution and depth profile in BF3 plasma doping
|
Kwok, Dixon T.K |
|
2001 |
136 |
1-3 |
p. 146-150 5 p. |
artikel |
17 |
Evolution of microstructure of instrumental AISI M2 steel after plasma immersion nitrogen and carbon implantation
|
Uglov, V.V |
|
2001 |
136 |
1-3 |
p. 226-230 5 p. |
artikel |
18 |
Index
|
|
|
2001 |
136 |
1-3 |
p. 290- 1 p. |
artikel |
19 |
Index
|
|
|
2001 |
136 |
1-3 |
p. 291-296 6 p. |
artikel |
20 |
Influence of Al film deposition and following treatment on the high temperature isothermal oxidation behavior of a γ-TiAl-based alloy
|
Li, X.Y |
|
2001 |
136 |
1-3 |
p. 276-280 5 p. |
artikel |
21 |
Inner wall coating of cylinders by plasma immersion ion implantation for corrosion protection
|
Ensinger, W |
|
2001 |
136 |
1-3 |
p. 202-206 5 p. |
artikel |
22 |
Inverter plasma discharge system
|
Sugimoto, Satoshi |
|
2001 |
136 |
1-3 |
p. 65-68 4 p. |
artikel |
23 |
Ion-assisted deposition of copper using an inverter plasma
|
Kiuchi, Masato |
|
2001 |
136 |
1-3 |
p. 273-275 3 p. |
artikel |
24 |
Ion current analysis in pulsed RF plasma as a fundamental research of plasma-based ion implantation
|
Tenno, N |
|
2001 |
136 |
1-3 |
p. 127-131 5 p. |
artikel |
25 |
Ion mass and scaling effects in PIII simulation
|
Keller, G |
|
2001 |
136 |
1-3 |
p. 117-121 5 p. |
artikel |
26 |
Measurement of sheath expansion in plasma source ion implantation
|
Kim, Young-Woo |
|
2001 |
136 |
1-3 |
p. 97-101 5 p. |
artikel |
27 |
Measurements of secondary electrons emitted from conductive substrates under high-current metal ion bombardment
|
Anders, André |
|
2001 |
136 |
1-3 |
p. 111-116 6 p. |
artikel |
28 |
Modeling of energy distributions for plasma implantation
|
Linder, Barry P. |
|
2001 |
136 |
1-3 |
p. 132-137 6 p. |
artikel |
29 |
Monitoring of ion mass composition in plasma immersion ion implantation
|
Kim, G.H. |
|
2001 |
136 |
1-3 |
p. 255-260 6 p. |
artikel |
30 |
Nano-indentation testing for plasma-based ion-implanted surface of plastics
|
Tonosaki, Minehiro |
|
2001 |
136 |
1-3 |
p. 249-251 3 p. |
artikel |
31 |
Negative bias effect on film growth using pulsed vacuum arc plasma for multilayers
|
Chun, Sung-Yong |
|
2001 |
136 |
1-3 |
p. 285-289 5 p. |
artikel |
32 |
New trends in PBII technology: industrial perspectives and limitations
|
Pelletier, J |
|
2001 |
136 |
1-3 |
p. 7-15 9 p. |
artikel |
33 |
Nitrogen and carbon expanded austenite produced by PI3
|
Blawert, C |
|
2001 |
136 |
1-3 |
p. 181-187 7 p. |
artikel |
34 |
Operational parameter effects on inverter plasma performance
|
Takechi, Seiji |
|
2001 |
136 |
1-3 |
p. 69-72 4 p. |
artikel |
35 |
Oxygen and hydrogen profiles in metal surfaces following plasma immersion ion implantation of helium
|
Johnson, P.B |
|
2001 |
136 |
1-3 |
p. 217-222 6 p. |
artikel |
36 |
PIII-nitriding of boron implantated stainless steel
|
Mändl, S |
|
2001 |
136 |
1-3 |
p. 176-180 5 p. |
artikel |
37 |
Plasma-based ion implantation and its application to three-dimensional materials
|
Yukimura, Ken |
|
2001 |
136 |
1-3 |
p. 1-6 6 p. |
artikel |
38 |
Plasma-based nitrogen implantation of chrome-plated steel
|
Xu, G.C |
|
2001 |
136 |
1-3 |
p. 231-235 5 p. |
artikel |
39 |
Plasma immersion ion implantation experiments at the Instituto Nacional de Pesquisas Espaciais (INPE), Brazil
|
Ueda, M. |
|
2001 |
136 |
1-3 |
p. 28-31 4 p. |
artikel |
40 |
Plasma immersion ion implantation experiments with long and short rise time pulses using high voltage hard tube pulser
|
Rossi, J.O |
|
2001 |
136 |
1-3 |
p. 43-46 4 p. |
artikel |
41 |
Plasma immersion ion implantation of nitrogen in Si: formation of SiO2, Si3N4 and stressed layers under thermal and sputtering effects
|
Ueda, M |
|
2001 |
136 |
1-3 |
p. 244-248 5 p. |
artikel |
42 |
Preface
|
Yamada, Isao |
|
2001 |
136 |
1-3 |
p. xi-xii nvt p. |
artikel |
43 |
Preparation and properties of nitrogen and titanium oxide incorporated diamond-like carbon films by plasma source ion implantation
|
Baba, Koumei |
|
2001 |
136 |
1-3 |
p. 192-196 5 p. |
artikel |
44 |
Preparation of gallium nitride (GaN) and related compounds by plasma immersion ion implantation and rapid thermal annealing
|
Ho, Aaron H.P |
|
2001 |
136 |
1-3 |
p. 142-145 4 p. |
artikel |
45 |
Production of focused electron beams in a plasma implantation system
|
Adler, R.J |
|
2001 |
136 |
1-3 |
p. 40-42 3 p. |
artikel |
46 |
Profile of implanted nitrogen ions in Al alloy for mold materials
|
Yamanishi, Tetsuji |
|
2001 |
136 |
1-3 |
p. 223-225 3 p. |
artikel |
47 |
Results from 2 years of operation of a plasma implantation facility
|
Adler, R.J |
|
2001 |
136 |
1-3 |
p. 252-254 3 p. |
artikel |
48 |
RF ion source for low energy ion implantation — beam profile control of a large-area ion source using 500-MHz discharge
|
Tanjyo, Masayasu |
|
2001 |
136 |
1-3 |
p. 281-284 4 p. |
artikel |
49 |
Rutile formation and oxygen diffusion in oxygen PIII-treated titanium
|
Thorwarth, G |
|
2001 |
136 |
1-3 |
p. 236-240 5 p. |
artikel |
50 |
Shunting arc as a pulsed ion source for solid-state materials for plasma-based ion implantation
|
Yukimura, K |
|
2001 |
136 |
1-3 |
p. 55-59 5 p. |
artikel |
51 |
Shunting arc generation by co-axial electrode configuration
|
Yukimura, Ken |
|
2001 |
136 |
1-3 |
p. 36-39 4 p. |
artikel |
52 |
Silicon carbide and amorphous carbon film formation by plasma immersion ion implantation: a comparison of methane and toluene as plasma forming gases
|
Volz, K |
|
2001 |
136 |
1-3 |
p. 197-201 5 p. |
artikel |
53 |
Spatial and temporal growth and collapse in a PBII plasma
|
Yatsuzuka, M |
|
2001 |
136 |
1-3 |
p. 93-96 4 p. |
artikel |
54 |
Spatial distributions of ion-species in a large-volume inductively coupled plasma source
|
Okuji, S |
|
2001 |
136 |
1-3 |
p. 102-105 4 p. |
artikel |
55 |
Studies on treatment homogeneity of plasma immersion ion implantation by an optical method
|
Volz, K |
|
2001 |
136 |
1-3 |
p. 80-84 5 p. |
artikel |
56 |
Surface processes and diffusion mechanisms of ion nitriding of stainless steel and aluminium
|
Möller, W. |
|
2001 |
136 |
1-3 |
p. 73-79 7 p. |
artikel |
57 |
Surface treatment of steel by short pulsed injection of high-power ion beam
|
Akamatsu, Hiroshi |
|
2001 |
136 |
1-3 |
p. 269-272 4 p. |
artikel |
58 |
Synthesis and properties of TiO2 thin films by plasma source ion implantation
|
Baba, Koumei |
|
2001 |
136 |
1-3 |
p. 241-243 3 p. |
artikel |
59 |
The measurement of nitrogen ion species ratio in inductively coupled plasma source ion implantation
|
Cho, Jeonghee |
|
2001 |
136 |
1-3 |
p. 106-110 5 p. |
artikel |
60 |
The use of plasma immersion ion processing in the synthesis of protective coatings for Al die casting
|
Nastasi, Michael |
|
2001 |
136 |
1-3 |
p. 162-167 6 p. |
artikel |
61 |
TiN coating and ion implantation of materials with three-dimensional topology in metal DC plasma-based ion implantation
|
Sano, M |
|
2001 |
136 |
1-3 |
p. 168-171 4 p. |
artikel |
62 |
Vacuum arc metal plasma production and the transition of processing mode from metal ion beam to dc metal plasma immersion
|
Brown, I.G |
|
2001 |
136 |
1-3 |
p. 16-22 7 p. |
artikel |
63 |
Width, structure and stability of sheaths in metal plasma immersion ion implantation and deposition: measurements and analytical considerations
|
Anders, André |
|
2001 |
136 |
1-3 |
p. 85-92 8 p. |
artikel |