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Journal description
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All issues of the corresponding volume
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Details for article 23 of 63 found articles
| Title: |
Ion-assisted deposition of copper using an inverter plasma |
| Author: |
Kiuchi, Masato Murai, Kensuke Tanaka, Katsutoshi Takechi, Seiji Sugimoto, Satoshi Goto, Seiichi |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 136 (2001) nr. 1-3 pages 3 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 63 found articles
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