| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Advanced mask aligner lithography (AMALITH) for thick photoresist
|
Voelkel, Reinhard
|
|
2013
|
20 |
10-11 |
p. 1839-1842
|
artikel
|
| 2 |
A Monte Carlo study of the primary absorbed energy redistribution in X-ray lithography
|
Meyer, P.
|
|
2013
|
20 |
10-11 |
p. 1881-1889
|
artikel
|
| 3 |
Application of metal film protection to microfluidic chip fabrication using CO2 laser ablation
|
Chung, C. K.
|
|
2013
|
20 |
10-11 |
p. 1987-1992
|
artikel
|
| 4 |
Arrays of high-aspect ratio microchannels for high-throughput isolation of circulating tumor cells (CTCs)
|
Hupert, Mateusz L.
|
|
2013
|
20 |
10-11 |
p. 1815-1825
|
artikel
|
| 5 |
Challenges with high aspect ratio nanoimprint
|
Scheer, Hella-Christin
|
|
2013
|
20 |
10-11 |
p. 1891-1898
|
artikel
|
| 6 |
Characterization method for new resist formulations for HAR patterns made by X-ray lithography
|
Kunka, Danays
|
|
2013
|
20 |
10-11 |
p. 2023-2029
|
artikel
|
| 7 |
Design and fabrication of microlens arrays as beam relay for free-space optical interconnection
|
Miao, Zhengyu
|
|
2013
|
20 |
10-11 |
p. 1843-1847
|
artikel
|
| 8 |
Development of high aspect ratio X-ray parabolic compound refractive lens at Indus-2 using X-ray lithography
|
Dhamgaye, V. P.
|
|
2014
|
20 |
10-11 |
p. 2055-2060
|
artikel
|
| 9 |
Direct imprinting of organic–inorganic hybrid materials into high aspect ratio sub-100 nm structures
|
Cadarso, V. J.
|
|
2013
|
20 |
10-11 |
p. 1961-1966
|
artikel
|
| 10 |
3D nanometer features by ultra precision machining
|
Haskic, Kurt
|
|
2014
|
20 |
10-11 |
p. 2051-2053
|
artikel
|
| 11 |
Editorial special issue HARMNST 2013
|
Mohr, Jürgen
|
|
2014
|
20 |
10-11 |
p. 1771
|
artikel
|
| 12 |
Evaluation of Young’s modulus of imprinted hydrogen silsesquioxane pillar after residual layer removal by reactive ion etching
|
Kang, Yuji
|
|
2013
|
20 |
10-11 |
p. 1899-1903
|
artikel
|
| 13 |
Fabrication and characterization of machined 3D diffractive optical elements
|
Kühne, Stefan
|
|
2014
|
20 |
10-11 |
p. 2103-2107
|
artikel
|
| 14 |
Fabrication and characterization of polymer microprisms
|
Forfang, William Brian Derek
|
|
2014
|
20 |
10-11 |
p. 2071-2077
|
artikel
|
| 15 |
Fabrication of a high aspect ratio (HAR) micropillar filter for a magnetic bead-based immunoassay
|
Ruffert, C.
|
|
2013
|
20 |
10-11 |
p. 1869-1873
|
artikel
|
| 16 |
Fabrication of gold nanoparticle pattern using imprinted hydrogen silsesquioxane pattern for surface-enhanced Raman scattering
|
Kang, Yuji
|
|
2013
|
20 |
10-11 |
p. 1993-2000
|
artikel
|
| 17 |
Fabrication of micro pore optics with smooth sidewall using X-ray lithography
|
Zhang, Tianchong
|
|
2013
|
20 |
10-11 |
p. 2005-2010
|
artikel
|
| 18 |
Fabrication of porous anodic aluminum oxide by hybrid pulse anodization at relatively high potential
|
Chung, C. K.
|
|
2013
|
20 |
10-11 |
p. 1827-1832
|
artikel
|
| 19 |
Ferroelectric thin film fabrication by direct UV-lithography
|
Benkler, Manuel
|
|
2013
|
20 |
10-11 |
p. 1859-1867
|
artikel
|
| 20 |
High aspect ratio gold nanopillars on microelectrodes for neural interfaces
|
Nick, C.
|
|
2013
|
20 |
10-11 |
p. 1849-1857
|
artikel
|
| 21 |
High-aspect-ratio nanoimprinted structures for a multi-pole magnetic scale
|
Xu, Zhi-Hao
|
|
2013
|
20 |
10-11 |
p. 1949-1953
|
artikel
|
| 22 |
High-aspect-ratio nanoporous membranes made by reactive ion etching and e-beam and interference lithography
|
Divan, Ralu
|
|
2013
|
20 |
10-11 |
p. 1797-1802
|
artikel
|
| 23 |
High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing
|
Do, Mai Trang
|
|
2014
|
20 |
10-11 |
p. 2097-2102
|
artikel
|
| 24 |
Hot embossing of transparent high aspect ratio micro parts
|
Kolew, A.
|
|
2013
|
20 |
10-11 |
p. 1967-1973
|
artikel
|
| 25 |
Infrared heated μ-blistering, a new fabrication technology for HARMST
|
Schmidt, Thomas
|
|
2014
|
20 |
10-11 |
p. 2017-2022
|
artikel
|
| 26 |
IR-drying of photoresists: experimental and theoretical consideration of drying kinetics of mono- and multi-layered coatings
|
Schönfeld, M.
|
|
2013
|
20 |
10-11 |
p. 1803-1806
|
artikel
|
| 27 |
Large tuning ratio high aspect ratio variable capacitors using leveraged bending
|
Achenbach, S.
|
|
2013
|
20 |
10-11 |
p. 1807-1813
|
artikel
|
| 28 |
LIGA micro-openings for coherence characterization of X-rays
|
Nazmov, V.
|
|
2014
|
20 |
10-11 |
p. 2031-2036
|
artikel
|
| 29 |
“LIGA2.X” process for mass production of single polymeric LIGA micro parts
|
Heneka, J.
|
|
2013
|
20 |
10-11 |
p. 1955-1960
|
artikel
|
| 30 |
Low cost method for hot embossing of microstructures on PMMA by SU-8 masters
|
Shamsi, Alireza
|
|
2013
|
20 |
10-11 |
p. 1925-1931
|
artikel
|
| 31 |
Mechanical material characterization of photosensitive polymers
|
Vogel, J.
|
|
2013
|
20 |
10-11 |
p. 1975-1979
|
artikel
|
| 32 |
Micro porous polymer foil for application in evaporation cooling
|
Drabiniok, Evelyn
|
|
2013
|
20 |
10-11 |
p. 1913-1918
|
artikel
|
| 33 |
Microstructuring of non-conductive silicon carbide by electrical discharge machining
|
Zeller, Florian
|
|
2013
|
20 |
10-11 |
p. 1875-1880
|
artikel
|
| 34 |
Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences
|
Schift, Helmut
|
|
2013
|
20 |
10-11 |
p. 1773-1781
|
artikel
|
| 35 |
Nano-microscale moulding of some metal plates with high strength Ni–W alloy moulds
|
Yamasaki, Tohru
|
|
2013
|
20 |
10-11 |
p. 1941-1948
|
artikel
|
| 36 |
2N Period submicron grating at the inner wall of a metal cylinder
|
Hirshy, H.
|
|
2013
|
20 |
10-11 |
p. 1833-1837
|
artikel
|
| 37 |
Orthogonal and fine lithographic structures attained from the next generation proton beam writing facility
|
Yao, Y.
|
|
2014
|
20 |
10-11 |
p. 2065-2069
|
artikel
|
| 38 |
Photo-lithographic patterning of biomimetic molecularly imprinted polymer thin films onto silicon wafers
|
Boysen, Reinhard I.
|
|
2014
|
20 |
10-11 |
p. 2037-2043
|
artikel
|
| 39 |
Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio
|
Bourrier, David
|
|
2014
|
20 |
10-11 |
p. 2089-2096
|
artikel
|
| 40 |
Rapid and low cost replication of complex microfluidic structures with PDMS double casting technology
|
Yang, Luxia
|
|
2013
|
20 |
10-11 |
p. 1933-1940
|
artikel
|
| 41 |
Rapid-manufacturing of micro-structured devices based on MWCNTs/PP composites by using hot embossing replication process
|
Zhang, Jie
|
|
2013
|
20 |
10-11 |
p. 1919-1924
|
artikel
|
| 42 |
Rapid soda-lime glass etching process for producing microfluidic channels with higher aspect ratio
|
Lin, Che-Hsin
|
|
2013
|
20 |
10-11 |
p. 1905-1911
|
artikel
|
| 43 |
Replication of sub-100 nm structures using h- and s-PDMS composite stamps
|
Huelsen, Christoph
|
|
2013
|
20 |
10-11 |
p. 2001-2004
|
artikel
|
| 44 |
Replication processes for metal and ceramic micro parts
|
Piotter, Volker
|
|
2013
|
20 |
10-11 |
p. 2011-2016
|
artikel
|
| 45 |
Resist evaluation for proton beam writing, Ni mold fabrication and nano-replication
|
Wang, Y. H.
|
|
2014
|
20 |
10-11 |
p. 2079-2088
|
artikel
|
| 46 |
SAM meets MEMS: reliable fabrication of stable Au-patterns embedded in PDMS using dry peel-off process
|
Byun, Ikjoo
|
|
2013
|
20 |
10-11 |
p. 1783-1789
|
artikel
|
| 47 |
Simulation and fabrication of a branch-channel rhombic micromixer for low pressure drop and short mixing length
|
Chung, C. K.
|
|
2013
|
20 |
10-11 |
p. 1981-1986
|
artikel
|
| 48 |
Status of laminar grating manufacturing via lithography at HZB
|
Lemke, S.
|
|
2014
|
20 |
10-11 |
p. 2061-2064
|
artikel
|
| 49 |
ViPER: simulation software for high aspect ratio plasma etching of silicon
|
Ishchuk, Valentyn
|
|
2013
|
20 |
10-11 |
p. 1791-1796
|
artikel
|
| 50 |
X-ray zone plates with 25 aspect ratio using a 2-μm-thick ultrananocrystalline diamond mold
|
Wojcik, Michael J.
|
|
2014
|
20 |
10-11 |
p. 2045-2050
|
artikel
|
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