| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A hybrid approach for fabrication of polymeric BIOMEMS devices
|
Singh, Varshni
|
|
2006
|
13 |
3-4 |
p. 369-377
|
artikel
|
| 2 |
A new removable resist for high aspect ratio applications
|
Schirmer, Matthias
|
|
2006
|
13 |
3-4 |
p. 335-338
|
artikel
|
| 3 |
Design and fabrication of a SU-8 based electrostatic microactuator
|
Dai, Wen
|
|
2006
|
13 |
3-4 |
p. 271-277
|
artikel
|
| 4 |
Design and UV-LIGA microfabrication of an electro-statically actuated power relay
|
Jeong, S. J.
|
|
2006
|
13 |
3-4 |
p. 279-286
|
artikel
|
| 5 |
Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration
|
Mekaru, Harutaka
|
|
2006
|
13 |
3-4 |
p. 385-391
|
artikel
|
| 6 |
Different methods for the fabrication of UV-LIGA molds using SU-8 with tapered de-molding angles
|
Fu, C.
|
|
2006
|
13 |
3-4 |
p. 293-298
|
artikel
|
| 7 |
Direct LIGA service for prototyping: status report
|
Loechel, B.
|
|
2006
|
13 |
3-4 |
p. 327-334
|
artikel
|
| 8 |
Effect of seed layer stress on the fabrication of monolithic MEMS microstructure
|
Chung, C. K.
|
|
2006
|
13 |
3-4 |
p. 299-304
|
artikel
|
| 9 |
Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert
|
Song, In-Hyouk
|
|
2006
|
13 |
3-4 |
p. 287-291
|
artikel
|
| 10 |
Fabrication of a spiral microcoil using a 3D-LIGA process
|
Mekaru, Harutaka
|
|
2006
|
13 |
3-4 |
p. 393-402
|
artikel
|
| 11 |
Fabrication of high aspect ratio nano gratings using SR lithography
|
Kato, Fumiki
|
|
2006
|
13 |
3-4 |
p. 221-225
|
artikel
|
| 12 |
Fabrication of micro-gas chromatograph columns for fast chromatography
|
Bhushan, Abhinav
|
|
2006
|
13 |
3-4 |
p. 361-368
|
artikel
|
| 13 |
Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask
|
Li, Yigui
|
|
2006
|
13 |
3-4 |
p. 227-230
|
artikel
|
| 14 |
Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating
|
Achenbach, Sven
|
|
2006
|
13 |
3-4 |
p. 343-347
|
artikel
|
| 15 |
Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography
|
Khumpuang, Sommawan
|
|
2006
|
13 |
3-4 |
p. 209-214
|
artikel
|
| 16 |
HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005
|
Kwon, Tai Hun
|
|
2006
|
13 |
3-4 |
p. 207
|
artikel
|
| 17 |
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
|
Lu, Hong
|
|
2006
|
13 |
3-4 |
p. 409
|
artikel
|
| 18 |
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
|
Lu, Hong
|
|
2006
|
13 |
3-4 |
p. 237-243
|
artikel
|
| 19 |
High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnector
|
Kim, Kabseog
|
|
2006
|
13 |
3-4 |
p. 231-235
|
artikel
|
| 20 |
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer
|
Ling, Z.
|
|
2006
|
13 |
3-4 |
p. 253-257
|
artikel
|
| 21 |
Investigations on possibilities of inline inspection of high aspect ratio microstructures
|
Engelke, Rainer
|
|
2006
|
13 |
3-4 |
p. 319-325
|
artikel
|
| 22 |
Large area micro hot embossing of Pyrex glass with GC mold machined by dicing
|
Takahashi, Masaharu
|
|
2006
|
13 |
3-4 |
p. 379-384
|
artikel
|
| 23 |
Mask design compensation for sloped sidewall structures fabricated by X-ray lithography
|
Horade, Mitsuhiro
|
|
2006
|
13 |
3-4 |
p. 215-219
|
artikel
|
| 24 |
Method for polymer hot embossing process development
|
Datta, Proyag
|
|
2006
|
13 |
3-4 |
p. 265-270
|
artikel
|
| 25 |
Microlens fabrication using an etched glass master
|
Zhang, P.
|
|
2006
|
13 |
3-4 |
p. 339-342
|
artikel
|
| 26 |
Micro-specific design flow for tool-based microtechnologies
|
Albers, Albert
|
|
2006
|
13 |
3-4 |
p. 305-310
|
artikel
|
| 27 |
Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizes
|
Mappes, Timo
|
|
2006
|
13 |
3-4 |
p. 355-360
|
artikel
|
| 28 |
Processing-microstructure-resulting materials properties of LIGA Ni
|
Lian, K.
|
|
2006
|
13 |
3-4 |
p. 259-264
|
artikel
|
| 29 |
Structure quality in deep X-ray lithography applying commercial polyimide-based masks
|
Achenbach, Sven
|
|
2006
|
13 |
3-4 |
p. 349-353
|
artikel
|
| 30 |
Study of PMMA thermal bonding
|
Zhu, Xuelin
|
|
2006
|
13 |
3-4 |
p. 403-407
|
artikel
|
| 31 |
SU-8 3D microoptic components fabricated by inclined UV lithography in water
|
Ling, Z.
|
|
2006
|
13 |
3-4 |
p. 245-251
|
artikel
|
| 32 |
SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts
|
Kouba, J.
|
|
2006
|
13 |
3-4 |
p. 311-317
|
artikel
|
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