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Journal description
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Details for article 8 of 32 found articles
| Title: |
Effect of seed layer stress on the fabrication of monolithic MEMS microstructure |
| Author: |
Chung, C. K. Fang, Y. J. Cheng, C. M. Hong, Y. Z. Wang, C. H. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 13 (2006) nr. 3-4 pages 299-304 |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 32 found articles
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