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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 3 of 32 found articles
| Title: |
Design and fabrication of a SU-8 based electrostatic microactuator |
| Author: |
Dai, Wen Lian, Kun Wang, Wanjun |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 13 (2006) nr. 3-4 pages 271-277 |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 32 found articles
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