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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
5 results found
| no | title | author | magazine | year | volume | issue | page(s) | type |
| 1 | An anisotropic U-shaped SF6-based plasma silicon trench etching investigation |
Burtsev, A |
1998 |
40 | 2 |
p. 85-97 13 p. |
article |
|
| 2 | A reliability comparison of RTO and furnace thin SiO2 layers: effect of the oxidation temperature |
Fonseca, L |
1998 |
40 | 2 |
p. 61-75 15 p. |
article |
|
| 3 | Numerical simulation of creation-passivation kinetics of interface traps in irradiated n-channel power VDMOSFETs during thermal annealing with various gate biases |
Ristić, Goran S. |
1998 |
40 | 2 |
p. 51-60 10 p. |
article |
|
| 4 | Simple simulation of electron-beam lithography for fabricating sub-0.2 μm T-shaped gates based on a two-layer resist system |
Xu, D |
1998 |
40 | 2 |
p. 77-83 7 p. |
article |
|
| 5 | Study of recoil implantation technique for deep low doped junction formation with aluminum |
Godignon, P |
1998 |
40 | 2 |
p. 99-109 11 p. |
article |
5 results found