|
| << previous |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 5 of 5 found articles
| Title: |
Study of recoil implantation technique for deep low doped junction formation with aluminum |
| Author: |
Godignon, P Morvan, E Montserrat, J Jordá, X Vellvehi, M Hidalgo, S Rebollo, J |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 40 (1998) nr. 2 pages 11 p. |
| Year: |
1998 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 5 found articles
| << previous |