| no |
title |
author |
magazine |
year |
volume |
issue |
page(s) |
type |
| 1 |
Advancements in Biodegradable Printed Circuit Boards: Review of Material Properties, Fabrication Methods, Applications and Challenges
|
Soon, Chin Fhong
|
|
|
25 |
9 |
p. 1925-1954
|
article
|
| 2 |
Analysis of Hot Continuous Process of Special Gas Storage Vessel for Semiconductor Cleaning Process
|
Kim, Beomgyu
|
|
|
25 |
9 |
p. 1759-1771
|
article
|
| 3 |
A Stroke Model for Straightening Partially Heat-Treated Ball Screws with Complex Mechanical Properties
|
Shin, Ji-Hyeon
|
|
|
25 |
9 |
p. 1875-1884
|
article
|
| 4 |
Correction: Super-Resolution Imaging of Sub-diffraction-Limited Pattern with Superlens Based on Deep Learning
|
Guan, Yizhao
|
|
|
25 |
9 |
p. 1955
|
article
|
| 5 |
DC and Analog/RF Performance Evaluation Using Dual Metal Gate Work Function Engineering of Junctionless Cylindrical Gate All Around Si Nanowire MOSFET Using NEGF Approach for Upcoming Sub 5 nm Technology Node
|
Sanjay,
|
|
|
25 |
9 |
p. 1885-1897
|
article
|
| 6 |
Design and Control of a Flexure-Based Dual Stage Piezoelectric Micropositioner
|
Zarrabi Ekbatani, Romina
|
|
|
25 |
9 |
p. 1793-1811
|
article
|
| 7 |
Development of Wafer Bonding System for High Precision Bonding Alignment
|
Kim, Tae-Ho
|
|
|
25 |
9 |
p. 1823-1841
|
article
|
| 8 |
Enhancement of In-Position Stability Performance in Magnetic Levitation Fine Stages Through Structural Mode Reinforcement
|
Jeong, Jaeheon
|
|
|
25 |
9 |
p. 1843-1850
|
article
|
| 9 |
Improving Path Accuracy and Vibration Character of Industrial Robot Arms with Iterative Learning Control Method
|
Jo, MinSu
|
|
|
25 |
9 |
p. 1851-1863
|
article
|
| 10 |
Optical Vibration Sensor Module Based on Beating Principle for Monitoring of Semiconductor Manufacturing Equipment
|
Moon, Kee S.
|
|
|
25 |
9 |
p. 1917-1924
|
article
|
| 11 |
Predicting the Critical Dimensions of Micron and Sub-micron Structures Using Joint Training Models and Electromagnetic Simulation Tools
|
Li, Jia-Wei
|
|
|
25 |
9 |
p. 1773-1781
|
article
|
| 12 |
Preface for Semiconductor Manufacturing Systems and Processes
|
Cech, Martin
|
|
|
25 |
9 |
p. 1757-1758
|
article
|
| 13 |
Pressure Distribution and Wear of Grinding Wheel in Ultra-Thinning Process of LiTaO3 Wafer
|
Hwang, Haeseong
|
|
|
25 |
9 |
p. 1865-1874
|
article
|
| 14 |
Super-Resolution and Optical Phase Retrieval Using Ptychographic Structured Illumination Microscopy
|
Usuki, Shin
|
|
|
25 |
9 |
p. 1813-1821
|
article
|
| 15 |
Super-Resolution Imaging of Sub-diffraction-Limited Pattern with Superlens Based on Deep Learning
|
Guan, Yizhao
|
|
|
25 |
9 |
p. 1783-1792
|
article
|
| 16 |
Temperature Control for High Removal Rate and Low Dishing in TGV CMP
|
Shin, Yeongil
|
|
|
25 |
9 |
p. 1899-1907
|
article
|
| 17 |
YOLOv4-Based Semiconductor Wafer Notch Detection Using Deep Learning and Image Enhancement Algorithms
|
Wang, Hao
|
|
|
25 |
9 |
p. 1909-1916
|
article
|
Journal description