| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A comparative analyze of fundamental noise in cantilever sensors based on lateral and longitudinal displacement: case of thermal infrared detectors
|
Matović, Jovan
|
|
2010
|
16 |
5 |
p. 755-763
|
artikel
|
| 2 |
Adhesive wafer bonding with photosensitive polymers for MEMS fabrication
|
Cakmak, Erkan
|
|
2009
|
16 |
5 |
p. 799-808
|
artikel
|
| 3 |
Adsorption–desorption noise in plasmonic chemical/biological sensors for multiple analyte environment
|
Jakšić, Olga
|
|
2010
|
16 |
5 |
p. 735-743
|
artikel
|
| 4 |
A dynamical envelope model for vibratory gyroscopes
|
Egretzberger, Markus
|
|
2009
|
16 |
5 |
p. 777-786
|
artikel
|
| 5 |
Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid
|
Manzaneque, Tomás
|
|
2009
|
16 |
5 |
p. 837-845
|
artikel
|
| 6 |
Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators
|
Hernando, Jorge
|
|
2010
|
16 |
5 |
p. 855-861
|
artikel
|
| 7 |
Design of self-assembling micromirror arrays for light guiding applications
|
Li, Qingdang
|
|
2009
|
16 |
5 |
p. 895-899
|
artikel
|
| 8 |
Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems: design, fabrication, characterization and optimization
|
Hildenbrand, J.
|
|
2010
|
16 |
5 |
p. 745-754
|
artikel
|
| 9 |
Flip chip packaging for MEMS microphones
|
Feiertag, Gregor
|
|
2010
|
16 |
5 |
p. 817-823
|
artikel
|
| 10 |
Gel-based biochip for the detection of airborne contaminants
|
Schmitt, Katrin
|
|
2009
|
16 |
5 |
p. 717-722
|
artikel
|
| 11 |
Growth of ZnO nanorods on patterned templates for efficient, large-area energy scavengers
|
Niarchos, G.
|
|
2010
|
16 |
5 |
p. 669-675
|
artikel
|
| 12 |
High-resolution eddy current sensor system for quality assessment of carbon fiber materials
|
Schulze, Martin H.
|
|
2010
|
16 |
5 |
p. 791-797
|
artikel
|
| 13 |
Influence of a chip scale package on the frequency response of a MEMS microphone
|
Winter, Matthias
|
|
2009
|
16 |
5 |
p. 809-815
|
artikel
|
| 14 |
Magnetic resonant harvesters and power management circuit for magnetic resonant harvesters
|
Jirků, Tomáš
|
|
2010
|
16 |
5 |
p. 677-690
|
artikel
|
| 15 |
Manufacturing, assembling and packaging of miniaturized neural implants
|
Stieglitz, Thomas
|
|
2010
|
16 |
5 |
p. 723-734
|
artikel
|
| 16 |
MEMS fluxgate magnetometer for parallel robot application
|
Kirchhoff, Maren Ramona
|
|
2009
|
16 |
5 |
p. 787-790
|
artikel
|
| 17 |
MOEMS translatory actuator characterisation, position encoding and closed-loop control
|
Lenzhofer, M.
|
|
2010
|
16 |
5 |
p. 901-907
|
artikel
|
| 18 |
Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems
|
Biehl, Saskia
|
|
2010
|
16 |
5 |
p. 879-883
|
artikel
|
| 19 |
Piezoresistive biochemical sensors based on hydrogels
|
Guenther, Margarita
|
|
2009
|
16 |
5 |
p. 703-715
|
artikel
|
| 20 |
Power sensitivity of vibration energy harvester
|
Hadas, Zdenek
|
|
2010
|
16 |
5 |
p. 691-702
|
artikel
|
| 21 |
Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials
|
Bolzmacher, Christian
|
|
2010
|
16 |
5 |
p. 847-853
|
artikel
|
| 22 |
Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process
|
Sökmen, Ü.
|
|
2010
|
16 |
5 |
p. 863-870
|
artikel
|
| 23 |
Single crystalline silicon based surface micromachining for high precision inertial sensors: technology and design for reliability
|
Knechtel, R.
|
|
2010
|
16 |
5 |
p. 885-893
|
artikel
|
| 24 |
Special Issue of the Conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE Europe Symposium ‘Microtechnologies for the New Millennium’ Dresden, Germany, 4–6 May 2009
|
Becker, Thomas
|
|
2010
|
16 |
5 |
p. 655
|
artikel
|
| 25 |
Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering
|
Grosser, Michaela
|
|
2010
|
16 |
5 |
p. 825-836
|
artikel
|
| 26 |
Tactile sensors based on conductive polymers
|
Castellanos-Ramos, Julián
|
|
2009
|
16 |
5 |
p. 765-776
|
artikel
|
| 27 |
Vibration energy scavenging via piezoelectric bimorphs of optimized shapes
|
Benasciutti, Denis
|
|
2009
|
16 |
5 |
p. 657-668
|
artikel
|
| 28 |
What happens turning a 250-μm-thin piezo-stack sideways?
|
Zaehringer, Sandy
|
|
2010
|
16 |
5 |
p. 871-877
|
artikel
|
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