| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A new pre-etching pattern to determine 〈110〉 crystallographic orientation on both (100) and (110) silicon wafers
|
Chang, W.-H.
|
|
2005
|
11 |
2-3 |
p. 117-128
|
artikel
|
| 2 |
A novel method for determining Young’s modulus of thin films by micro-strain gauges
|
Pan, Chi Hsiang
|
|
2005
|
11 |
2-3 |
p. 151-157
|
artikel
|
| 3 |
A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure
|
Chen, Y.
|
|
2005
|
11 |
2-3 |
p. 111-116
|
artikel
|
| 4 |
A robust and reliable stress-induced self-assembly supporting mechanism for optical devices
|
Ho, Y.-P.
|
|
2005
|
11 |
2-3 |
p. 214-220
|
artikel
|
| 5 |
A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications
|
Lin, W. T.
|
|
2005
|
11 |
2-3 |
p. 204-209
|
artikel
|
| 6 |
A simple micro-mixer prototyped in polycarbonate
|
Wan, Stephen
|
|
2005
|
11 |
2-3 |
p. 75-79
|
artikel
|
| 7 |
Bulk micromachining fabrication platform using the integration of DRIE and wet anisotropic etching
|
Chu, Huai-Yuan
|
|
2005
|
11 |
2-3 |
p. 141-150
|
artikel
|
| 8 |
Casimir effect on the pull-in parameters of nanometer switches
|
Lin, W.-H.
|
|
2005
|
11 |
2-3 |
p. 80-85
|
artikel
|
| 9 |
3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer
|
Park, Jong-Yeon
|
|
2005
|
11 |
2-3 |
p. 168-178
|
artikel
|
| 10 |
Electrical detection of DNA hybridization with multilayer gold nanoparticles between nanogap electrodes
|
Tsai, C.-Y.
|
|
2005
|
11 |
2-3 |
p. 91-96
|
artikel
|
| 11 |
High temperature resistant antireflective moth-eye structures for infrared radiation sensors
|
Glaser, T.
|
|
2005
|
11 |
2-3 |
p. 86-90
|
artikel
|
| 12 |
Injection molding of 3D microstructures by μPIM
|
Tay, B.Y.
|
|
2005
|
11 |
2-3 |
p. 210-213
|
artikel
|
| 13 |
Investigations of the capillary effect for gripping silicon chips
|
Grutzeck, H.
|
|
2005
|
11 |
2-3 |
p. 194-203
|
artikel
|
| 14 |
Laser beam soldering – a new assembly technology for microoptical systems
|
Banse, H.
|
|
2005
|
11 |
2-3 |
p. 186-193
|
artikel
|
| 15 |
Laser scanning path generation considering photopolymer solidification in micro-stereolithography
|
Cho, Y. H.
|
|
2005
|
11 |
2-3 |
p. 158-167
|
artikel
|
| 16 |
Metallic microstructures by electroforming from conducting polymer templates
|
Holstein, N.
|
|
2005
|
11 |
2-3 |
p. 179-185
|
artikel
|
| 17 |
Overcoming SU-8 stiction in high aspect ratio structures
|
Peele, A. G.
|
|
2005
|
11 |
2-3 |
p. 221-224
|
artikel
|
| 18 |
Silicon MEMS components: a fatigue life assessment approach
|
Varvani-Farahani, A.
|
|
2005
|
11 |
2-3 |
p. 129-134
|
artikel
|
| 19 |
The evaporated metal masks for chemical glass etching for BioMEMS
|
Mourzina, Y.
|
|
2005
|
11 |
2-3 |
p. 135-140
|
artikel
|
| 20 |
Tuning the quality factor of bulk micromachined structures using squeezed-film damping
|
Cheng, C.-C.
|
|
2005
|
11 |
2-3 |
p. 104-110
|
artikel
|
| 21 |
Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy
|
Qian, J.
|
|
2005
|
11 |
2-3 |
p. 97-103
|
artikel
|
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