| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Controlling the Si(001) Surface Morphology upon Thermal Annealing in a Vacuum Chamber
|
Rodyakina, E. E.
|
|
2018
|
47 |
6 |
p. 365-370
|
artikel
|
| 2 |
Etching of GaAs in the Plasma of a Freon R-12–Argon (CCl2F2/Ar) Mixture
|
Murin, D. B.
|
|
2019
|
47 |
6 |
p. 434-442
|
artikel
|
| 3 |
Etching of SiC in Low Power Inductively-Coupled Plasma
|
Osipov, A. A.
|
|
2019
|
47 |
6 |
p. 427-433
|
artikel
|
| 4 |
Investigation of Alloyed Ohmic Contacts in Epitaxial Tellurium-Doped Gallium Arsenide Layers
|
Egorkin, V. I.
|
|
2018
|
47 |
6 |
p. 388-392
|
artikel
|
| 5 |
Modeling the Dynamics of the Integral Dielectric Permittivity of a Porous Low-K Organosilicate Film during the Dry Etching of a Photoresist in O2 Plasma
|
Rezvanov, A. A.
|
|
2018
|
47 |
6 |
p. 415-426
|
artikel
|
| 6 |
Operational Features of MEMS with an Even Number of Electrodes
|
Dragunov, V. P.
|
|
2018
|
47 |
6 |
p. 393-406
|
artikel
|
| 7 |
Parameters of Plasma and Kinetics of Active Particles in CF4 (CHF3) + Ar Mixtures of a Variable Initial Composition
|
Efremov, A. M.
|
|
2018
|
47 |
6 |
p. 371-380
|
artikel
|
| 8 |
Quality Control of a Multilayer Spin-Tunnel Structure with the Use of a Combination of Analytical Methods
|
Trushin, O. S.
|
|
2018
|
47 |
6 |
p. 381-387
|
artikel
|
| 9 |
Simulation the Effects of Single Nuclear Particles on STG RS Triggers with Transistors Spacing into Two Groups
|
Stenin, V. Ya.
|
|
2018
|
47 |
6 |
p. 407-414
|
artikel
|
| 10 |
Stacked Gate FinFET with Gate Extension for Improved Gate Control
|
Sangeeta Mangesh,
|
|
2018
|
47 |
6 |
p. 443-448
|
artikel
|
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