nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
A kinetic lattice Monte-Carlo approach to the evolution of boron in silicon
|
Strobel, M. |
|
2002 |
186 |
1-4 |
p. 339-343 5 p. |
artikel |
2 |
An enhanced approach to numerical modeling of heavily irradiated silicon devices
|
Moscatelli, F. |
|
2002 |
186 |
1-4 |
p. 171-175 5 p. |
artikel |
3 |
An IR-reflectivity and X-ray diffraction study of high energy He-ion implantation-induced damage in 4H–SiC
|
Declémy, A. |
|
2002 |
186 |
1-4 |
p. 318-323 6 p. |
artikel |
4 |
Anormal growth of cavities in MeV He implanted Si covered with a thin Al foil
|
Delamare, R |
|
2002 |
186 |
1-4 |
p. 324-328 5 p. |
artikel |
5 |
Author index
|
|
|
2002 |
186 |
1-4 |
p. 446-454 9 p. |
artikel |
6 |
Bulk generation lifetime studies in semiconductor structures with nonuniform distribution of electrically active defects in silicon
|
Popov, V.M. |
|
2002 |
186 |
1-4 |
p. 88-93 6 p. |
artikel |
7 |
Carrier lifetime and turn-off current control by electron irradiation of MCT
|
Chernyavsky, E.V |
|
2002 |
186 |
1-4 |
p. 157-160 4 p. |
artikel |
8 |
Characterization of hydrophobic bonded silicon wafers
|
Keskitalo, Niclas |
|
2002 |
186 |
1-4 |
p. 66-70 5 p. |
artikel |
9 |
Cobalt silicide formation inside surface defects of a silicon substrate
|
Belousov, I |
|
2002 |
186 |
1-4 |
p. 61-65 5 p. |
artikel |
10 |
Co-implantation of hydrogen and helium for thermal stabilization of lifetime in power devices
|
Ntsoenzok, E |
|
2002 |
186 |
1-4 |
p. 371-374 4 p. |
artikel |
11 |
Computer image analysis of shrinkage of isolated amorphous zones in semiconductors induced by electron beam
|
Jenčič, I. |
|
2002 |
186 |
1-4 |
p. 126-131 6 p. |
artikel |
12 |
Contents
|
|
|
2002 |
186 |
1-4 |
p. ix-xii nvt p. |
artikel |
13 |
Cryogenic investigations and modelling of inter-defect charge exchange in silicon particle detectors
|
MacEvoy, B.C |
|
2002 |
186 |
1-4 |
p. 138-143 6 p. |
artikel |
14 |
Current status of models for transient phenomena in dopant diffusion and activation
|
Pichler, P. |
|
2002 |
186 |
1-4 |
p. 256-264 9 p. |
artikel |
15 |
Defect assessment of irradiated STI diodes
|
Ohyama, H. |
|
2002 |
186 |
1-4 |
p. 424-428 5 p. |
artikel |
16 |
Defect distributions in silicon implanted with low doses of MeV ions
|
Hallén, Anders |
|
2002 |
186 |
1-4 |
p. 344-348 5 p. |
artikel |
17 |
Defect engineering in Czochralski silicon by electron irradiation at different temperatures
|
Lindström, J.L |
|
2002 |
186 |
1-4 |
p. 121-125 5 p. |
artikel |
18 |
Defect engineering in III–V ternary alloys: Effects of strain and local charge on the formation of native deep defects
|
Amore Bonapasta, A. |
|
2002 |
186 |
1-4 |
p. 229-233 5 p. |
artikel |
19 |
Defect generation in crystalline silicon irradiated with high energy particles
|
Kuhnke, M. |
|
2002 |
186 |
1-4 |
p. 144-151 8 p. |
artikel |
20 |
Defects in carbon and oxygen implanted p-type silicon
|
Pivac, B |
|
2002 |
186 |
1-4 |
p. 355-359 5 p. |
artikel |
21 |
Defects induced by high energy helium implantation in 4H–SiC
|
Beaufort, M.F |
|
2002 |
186 |
1-4 |
p. 218-222 5 p. |
artikel |
22 |
Diffusion and clustering of supersaturated carbon in SiGeC layers under oxidation
|
Napolitani, E |
|
2002 |
186 |
1-4 |
p. 212-217 6 p. |
artikel |
23 |
Distribution of defects and impurities in gallium arsenide wafers after surface gettering
|
Gorelenok, A.T |
|
2002 |
186 |
1-4 |
p. 240-245 6 p. |
artikel |
24 |
DLTS and EPR study of defects in H implanted silicon
|
Mikšić, V |
|
2002 |
186 |
1-4 |
p. 36-40 5 p. |
artikel |
25 |
DLTS and PL studies of proton radiation defects in tin-doped FZ silicon
|
Simoen, E |
|
2002 |
186 |
1-4 |
p. 19-23 5 p. |
artikel |
26 |
Dopant behaviour and damage annealing in silicon implanted with 1 keV arsenic
|
Whelan, S |
|
2002 |
186 |
1-4 |
p. 271-275 5 p. |
artikel |
27 |
Dose-rate influence on the defect production in MeV proton-implanted float-zone and epitaxial n-type silicon
|
Lévêque, P |
|
2002 |
186 |
1-4 |
p. 375-379 5 p. |
artikel |
28 |
Editorial
|
Privitera, Vittorio |
|
2002 |
186 |
1-4 |
p. vii- 1 p. |
artikel |
29 |
Effect of nitrogen segregation on TED and loss of phosphorus in CZ-Si
|
Fujiwara, N |
|
2002 |
186 |
1-4 |
p. 313-317 5 p. |
artikel |
30 |
Effect of rapid thermal annealing on oxide precipitation behavior in silicon crystal
|
Akatsuka, M |
|
2002 |
186 |
1-4 |
p. 46-54 9 p. |
artikel |
31 |
Effect of the Ge preamorphization dose on boron diffusion and defect evolution in silicon
|
Colombeau, B. |
|
2002 |
186 |
1-4 |
p. 276-280 5 p. |
artikel |
32 |
Electron paramagnetic resonance study of proton implantation induced defects in monocrystalline 4H– and 6H–SiC
|
von Bardeleben, H.J |
|
2002 |
186 |
1-4 |
p. 201-205 5 p. |
artikel |
33 |
Engineering the diffusion behavior of dopants (B,Sb) in silicon by incorporation of carbon
|
Lavéant, P |
|
2002 |
186 |
1-4 |
p. 292-297 6 p. |
artikel |
34 |
EPR studies of neutron-irradiated n-type FZ silicon doped with tin
|
Mitrikas, G |
|
2002 |
186 |
1-4 |
p. 181-185 5 p. |
artikel |
35 |
57Fe Mössbauer study of radiation damage in ion-implanted Si, SiGe and SiSn
|
Gunnlaugsson, H.P |
|
2002 |
186 |
1-4 |
p. 55-60 6 p. |
artikel |
36 |
Flash lamp annealing with millisecond pulses for ultra-shallow boron profiles in silicon
|
Gebel, T |
|
2002 |
186 |
1-4 |
p. 287-291 5 p. |
artikel |
37 |
Formation and annealing of periodically arranged amorphous SiC x nanoclusters in silicon
|
Lindner, J.K.N |
|
2002 |
186 |
1-4 |
p. 206-211 6 p. |
artikel |
38 |
Formation of electrically active defects in neutron irradiated silicon
|
Kaminski, P |
|
2002 |
186 |
1-4 |
p. 152-156 5 p. |
artikel |
39 |
Formation of luminescent structures on Cz-silicon by hydrogen plasma treatments and oxidation
|
Job, R |
|
2002 |
186 |
1-4 |
p. 132-137 6 p. |
artikel |
40 |
Future technology for advanced MOS devices
|
Wyon, C |
|
2002 |
186 |
1-4 |
p. 380-391 12 p. |
artikel |
41 |
Generation of defects induced by MeV proton implantation in silicon – Influence of nuclear losses
|
David, M.-L |
|
2002 |
186 |
1-4 |
p. 309-312 4 p. |
artikel |
42 |
Helium implantation defects in SiC studied by thermal helium desorption spectrometry
|
Oliviero, E |
|
2002 |
186 |
1-4 |
p. 223-228 6 p. |
artikel |
43 |
High resolution Laplace DLTS studies of defects in ion-implanted silicon
|
Evans-Freeman, J.H |
|
2002 |
186 |
1-4 |
p. 41-45 5 p. |
artikel |
44 |
Hydrogen enhanced thermal donor formation in oxygen enriched high resistive float-zone silicon
|
Job, R |
|
2002 |
186 |
1-4 |
p. 116-120 5 p. |
artikel |
45 |
Impact of fast-neutron irradiation on the silicon p–n junction leakage and role of the diffusion reverse current
|
Czerwinski, A. |
|
2002 |
186 |
1-4 |
p. 166-170 5 p. |
artikel |
46 |
Influence of fluorine on the simulation of the transient enhanced diffusion of 15 keV BF2 + ion implantation into silicon
|
Dusch, A |
|
2002 |
186 |
1-4 |
p. 360-365 6 p. |
artikel |
47 |
Interaction between point defects in the Si–SiO2 system during the process of its formation
|
Kropman, D |
|
2002 |
186 |
1-4 |
p. 78-82 5 p. |
artikel |
48 |
Interactions of primary defects with impurities in silicon
|
Mukashev, B.N. |
|
2002 |
186 |
1-4 |
p. 83-87 5 p. |
artikel |
49 |
Ion implantation of silicon carbide
|
Hallén, A |
|
2002 |
186 |
1-4 |
p. 186-194 9 p. |
artikel |
50 |
γ-irradiation hardness of short-channel nMOSFETs fabricated in a 0.5 μm SOI technology
|
Claeys, C |
|
2002 |
186 |
1-4 |
p. 429-434 6 p. |
artikel |
51 |
Issues on boron electrical activation in silicon: Experiments on boron clusters and shallow junctions formation
|
Mannino, Giovanni |
|
2002 |
186 |
1-4 |
p. 246-255 10 p. |
artikel |
52 |
Modeling of the Ostwald ripening of extrinsic defects and transient enhanced diffusion in silicon
|
Claverie, A |
|
2002 |
186 |
1-4 |
p. 281-286 6 p. |
artikel |
53 |
New results for a novel oxygenated silicon material
|
Da Via', C |
|
2002 |
186 |
1-4 |
p. 111-115 5 p. |
artikel |
54 |
Non-equilibrium impurity redistribution in Si
|
Buzynin, A.N |
|
2002 |
186 |
1-4 |
p. 366-370 5 p. |
artikel |
55 |
On-line DLTS investigations of the mono- and di-vacancy in p-type silicon after low temperature electron irradiation
|
Zangenberg, Nikolaj |
|
2002 |
186 |
1-4 |
p. 71-77 7 p. |
artikel |
56 |
Optical studies of ion-implantation centres in silicon
|
Davies, Gordon |
|
2002 |
186 |
1-4 |
p. 1-9 9 p. |
artikel |
57 |
Optimum lifetime structuring in silicon power diodes by means of various irradiation techniques
|
Hazdra, P. |
|
2002 |
186 |
1-4 |
p. 414-418 5 p. |
artikel |
58 |
Photo-dissociation of hydrogen passivated dopants in gallium arsenide
|
Tong, L |
|
2002 |
186 |
1-4 |
p. 234-239 6 p. |
artikel |
59 |
Porous silicon-based passivation and gettering in polycrystalline silicon solar cells
|
Dimassi, W |
|
2002 |
186 |
1-4 |
p. 441-445 5 p. |
artikel |
60 |
Positron beam and Raman analysis of hydrogen plasma treated and annealed Cz-Si
|
Schut, H |
|
2002 |
186 |
1-4 |
p. 94-99 6 p. |
artikel |
61 |
Prevention of impurity gettering in the R P/2 region of ion-implanted silicon by defect engineering
|
Kögler, R. |
|
2002 |
186 |
1-4 |
p. 298-302 5 p. |
artikel |
62 |
Radiation damage in flash memory cells
|
Claeys, C. |
|
2002 |
186 |
1-4 |
p. 392-400 9 p. |
artikel |
63 |
Radiation damage of polycrystalline silicon films
|
Ohyama, H. |
|
2002 |
186 |
1-4 |
p. 176-180 5 p. |
artikel |
64 |
Radiation effect on n-MOSFETs fabricated in a BiCMOS process
|
Ohyama, H |
|
2002 |
186 |
1-4 |
p. 419-423 5 p. |
artikel |
65 |
Radiation effects on the current–voltage and capacitance–voltage characteristics of advanced p–n junction diodes surrounded by shallow trench isolation
|
Poyai, A. |
|
2002 |
186 |
1-4 |
p. 409-413 5 p. |
artikel |
66 |
Raman and photoluminescence investigations of the H+ ion implanted silicon-on-insulator structure formed by hydrogen ion cut
|
Tyschenko, I.E |
|
2002 |
186 |
1-4 |
p. 329-333 5 p. |
artikel |
67 |
Relation between microscopic defects and macroscopic changes in silicon detector properties after hadron irradiation
|
Moll, M |
|
2002 |
186 |
1-4 |
p. 100-110 11 p. |
artikel |
68 |
Reversible and irreversible reaction fronts in two competing reactions system
|
Sinder, M |
|
2002 |
186 |
1-4 |
p. 161-165 5 p. |
artikel |
69 |
Room temperature defect diffusion in ion implanted c-Si
|
Libertino, Sebania |
|
2002 |
186 |
1-4 |
p. 265-270 6 p. |
artikel |
70 |
Self-interstitial clusters in silicon
|
Jones, R. |
|
2002 |
186 |
1-4 |
p. 10-18 9 p. |
artikel |
71 |
Separation of vacancy and interstitial depth profiles in proton- and boron-implanted silicon
|
Pellegrino, P |
|
2002 |
186 |
1-4 |
p. 334-338 5 p. |
artikel |
72 |
Some aspects of blistering and exfoliation of helium–hydrogen coimplanted (100) silicon
|
Corni, F |
|
2002 |
186 |
1-4 |
p. 349-354 6 p. |
artikel |
73 |
Structure of tin–vacancy defects in silicon
|
Kaukonen, M |
|
2002 |
186 |
1-4 |
p. 24-29 6 p. |
artikel |
74 |
TCAD calibration of USJ profiles for advanced deep sub-μm CMOS processes
|
Zechner, C |
|
2002 |
186 |
1-4 |
p. 303-308 6 p. |
artikel |
75 |
The di-vacancy in particle-irradiated, strain-relaxed SiGe
|
av Skardi, H |
|
2002 |
186 |
1-4 |
p. 195-200 6 p. |
artikel |
76 |
Time domain and frequency analysis of RTS noise in deep submicron SiGe HBTs
|
Raoult, J |
|
2002 |
186 |
1-4 |
p. 435-440 6 p. |
artikel |
77 |
Time domain measurement of spin-dependent recombination – A novel defect spectroscopy method
|
Boehme, Christoph |
|
2002 |
186 |
1-4 |
p. 30-35 6 p. |
artikel |
78 |
Ultra-shallow junction formation by excimer laser annealing and low energy (<1 keV) B implantation: A two-dimensional analysis
|
Fortunato, G. |
|
2002 |
186 |
1-4 |
p. 401-408 8 p. |
artikel |