| no |
title |
author |
magazine |
year |
volume |
issue |
page(s) |
type |
| 1 |
cBN Films grown by hot filament assisted microwave electron cyclotron resonance CVD
|
Zhang, S.J
|
|
2002
|
66 |
1 |
p. 65-70
6 p.
|
article
|
| 2 |
Characteristics of Cu and Zn films deposited on glass and stainless steel substrates at different substrate temperatures and angle of incidence
|
Savaloni, Hadi
|
|
2002
|
66 |
1 |
p. 49-58
10 p.
|
article
|
| 3 |
Characterizing the effects of multiprocess parameters on the preferred orientation of TiN coating using a combined index
|
Chen, Y.M.
|
|
2002
|
66 |
1 |
p. 19-25
7 p.
|
article
|
| 4 |
Electrical and optical characterizations by prism-coupling method of PZT deposited in-situ by sputtering
|
Dogheche, E.
|
|
2002
|
66 |
1 |
p. 1-8
8 p.
|
article
|
| 5 |
Heat treatment effect on the structural and optical properties of AgInSe2 thin films
|
Ammar, A.H
|
|
2002
|
66 |
1 |
p. 27-38
12 p.
|
article
|
| 6 |
Interfacial properties of a hetero-structure YSZ/p-(100)Si prepared by magnetron sputtering (Vacuum 2002;65:19)
|
Jeon, Sanghun
|
|
2002
|
66 |
1 |
p. 93-
1 p.
|
article
|
| 7 |
Multi-tip cones induced by ion-bombardment
|
Meng, F.Y
|
|
2002
|
66 |
1 |
p. 71-76
6 p.
|
article
|
| 8 |
Precision dimensions control by measuring the gas flow through a gap between sample and test die
|
Pregelj, Andrej
|
|
2002
|
66 |
1 |
p. 87-89
3 p.
|
article
|
| 9 |
Real dimensional simulation of anisotropic etching of silicon in CF4+O2 plasma
|
Knizikevičius, R.
|
|
2002
|
66 |
1 |
p. 39-47
9 p.
|
article
|
| 10 |
Structure and properties of copper nitride films formed by reactive magnetron sputtering
|
Pierson, J.F
|
|
2002
|
66 |
1 |
p. 59-64
6 p.
|
article
|
| 11 |
Surface structure formation in ion deposition
|
Levchenko, Igor G
|
|
2002
|
66 |
1 |
p. 77-85
9 p.
|
article
|
| 12 |
Target voltage behaviour during DC sputtering of silicon in an argon/nitrogen mixture
|
Depla, D.
|
|
2002
|
66 |
1 |
p. 9-17
9 p.
|
article
|
| 13 |
Thin-film optical filters, 3rd Edition
|
Steckelmacher, W
|
|
2002
|
66 |
1 |
p. 91-92
2 p.
|
article
|
| 14 |
VACUUM Diary
|
|
|
2002
|
66 |
1 |
p. I-III
nvt p.
|
article
|
Journal description