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                                       Details for article 1 of 14 found articles
 
 
  cBN Films grown by hot filament assisted microwave electron cyclotron resonance CVD
 
 
Title: cBN Films grown by hot filament assisted microwave electron cyclotron resonance CVD
Author: Zhang, S.J
Chen, G.H
Deng, J.X
Zhang, D.X
Ren, W
Wang, B
Yan, H
Appeared in: Vacuum
Paging: Volume 66 (2002) nr. 1 pages 6 p.
Year: 2002
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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