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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology |
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Titel: |
Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology |
Auteur: |
Xiong, Ji-jun Zheng, Shi-jun Hong, Ying-ping Li, Jun Wang, Ying-lin Wang, Wei Tan, Qiu-lin |
Verschenen in: |
Journal of Zhejiang University, Science C, Computers & electronics |
Paginering: |
Jaargang 14 (2013) nr. 4 pagina's 258-263 |
Jaar: |
2013 |
Inhoud: |
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Uitgever: |
SP Zhejiang University Press, Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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