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Electrical characterization of integrated passive devices using thin film technology for 3D integration |
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Titel: |
Electrical characterization of integrated passive devices using thin film technology for 3D integration |
Auteur: |
Sun, Xin Zhu, Yun-hui Liu, Zhen-hua Cui, Qing-hu Ma, Sheng-lin Chen, Jing Miao, Min Jin, Yu-feng |
Verschenen in: |
Journal of Zhejiang University, Science C, Computers & electronics |
Paginering: |
Jaargang 14 (2013) nr. 4 pagina's 235-243 |
Jaar: |
2013 |
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Uitgever: |
SP Zhejiang University Press, Heidelberg |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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