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Journal description
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Details for article 8 of 10 found articles
| Title: |
Scanning electron microscopy used to measure the feature dimensions of a nanoscale test pattern on a silicon surface |
| Author: |
Gavrilenko, V. P. Larionov, Yu. V. Mityukhlyaev, V. B. Rakov, A. V. Todua, P. A. Filippov, M. N. Sharonov, V. A. |
| Appeared in: |
Russian microelectronics |
| Paging: | Volume 40 (2011) nr. 6 pages 436-440 |
| Year: |
2011 |
| Contents: | |
| Publisher: |
SP MAIK Nauka/Interperiodica, Dordrecht |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 10 found articles
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