Electrical and Optical Characterization of AlGaN/GaN HEMTs with In Situ and Ex Situ Deposited SiNx Layers
Titel:
Electrical and Optical Characterization of AlGaN/GaN HEMTs with In Situ and Ex Situ Deposited SiNx Layers
Auteur:
Tadjer, Marko J. Anderson, Travis J. Hobart, Karl D. Mastro, Michael A. Hite, Jennifer K. Caldwell, Joshua D. Picard, Yoosuf N. Kub, Fritz J. Eddy, Charles R.