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  Advances in pulsed-laser-deposited AIN thin films for high-temperature capping, device passivation, and piezoelectric-based RF MEMS/NEMS resonator applications
 
 
Title: Advances in pulsed-laser-deposited AIN thin films for high-temperature capping, device passivation, and piezoelectric-based RF MEMS/NEMS resonator applications
Author: Hullavarad, S. S.
Vispute, R. D.
Nagaraj, B.
Kulkarni, V. N.
Dhar, S.
Venkatesan, T.
Jones, K. A.
Derenge, M.
Zheleva, T.
Ervin, M. H.
Lelis, A.
Scozzie, C. J.
Habersat, D.
Wickenden, A. E.
Currano, L. J.
Dubey, M.
Appeared in: Journal of electronic materials
Paging: Volume 35 () nr. 4 pages 777-794
Year: 2006-03-31
Contents:
Publisher: Springer-Verlag, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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