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Damage accumulation during cryogenic and room temperature implantations in strained SiGe alloys |
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Titel: |
Damage accumulation during cryogenic and room temperature implantations in strained SiGe alloys |
Auteur: |
Payet, Anthony Luce, Flavia Piegas Curfs, Caroline Mathieu, Benoît Sklénard, Benoît Barbé, Jean-Charles Batude, Perrine Joblot, Sylvain Tavernier, Clément Colombeau, Benjamin Guissi, Sofiene Martin-Bragado, Ignacio Gergaud, Patrice |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 42 (2016) nr. P2 pagina's 4 p. |
Jaar: |
2016 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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