Defect evolution and dopant activation in laser annealed Si and Ge
Titel:
Defect evolution and dopant activation in laser annealed Si and Ge
Auteur:
Cristiano, F. Shayesteh, M. Duffy, R. Huet, K. Mazzamuto, F. Qiu, Y. Quillec, M. Henrichsen, H.H. Nielsen, P.F. Petersen, D.H. La Magna, A. Caruso, G. Boninelli, S.