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Journal description
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Details for article 72 of 78 found articles
| Title: |
The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma |
| Author: |
Durand-Drouhin, O. Lejeune, M. Bouzerar, R. Benlahsen, M. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 4 (2001) nr. 1-3 pages 213-215 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 72 of 78 found articles
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