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Details for article 71 of 78 found articles
| Title: |
The study on the radial distribution of delta [Oi] in heavily doped Si wafer using X-ray diffraction |
| Author: |
Lee, Dong-Kun Hwang, Don-Ha Lee, Soon-Hyun Mun, Young-Hee Lee, Bo-Young Yoo, Hak-Do |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 4 (2001) nr. 1-3 pages 47-49 |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 71 of 78 found articles
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