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Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing |
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Titel: |
Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing |
Auteur: |
Kada, W. Miura, K. Kato, H. Saruya, R. Kubota, A. Satoh, T. Koka, M. Ishii, Y. Kamiya, T. Nishikawa, H. Hanaizumi, O. |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 348 (2015) nr. C pagina's 5 p. |
Jaar: |
2015 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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