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Development of diagnostic method for deep levels in semiconductors using charge induced by heavy ion microbeams |
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Titel: |
Development of diagnostic method for deep levels in semiconductors using charge induced by heavy ion microbeams |
Auteur: |
Kada, Wataru Kambayashi, Yuya Iwamoto, Naoya Onoda, Shinobu Makino, Takahiro Koka, Masashi Kamiya, Tomihiro Hoshino, Norihiro Tsuchida, Hidekazu Kojima, Kazutoshi Hanaizumi, Osamu Ohshima, Takeshi |
Verschenen in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paginering: |
Jaargang 348 (2015) nr. C pagina's 6 p. |
Jaar: |
2015 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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