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Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing |
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Title: |
Development of embedded Mach–Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing |
Author: |
Kada, W. Miura, K. Kato, H. Saruya, R. Kubota, A. Satoh, T. Koka, M. Ishii, Y. Kamiya, T. Nishikawa, H. Hanaizumi, O. |
Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
Paging: |
Volume 348 (2015) nr. C pages 5 p. |
Year: |
2015 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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