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Details for article 28 of 74 found articles
| Title: |
Enhancement of effective dielectric constant using high-temperature mixed and sub-nano-laminated atomic layer deposited Y2O3/Al2O3 on GaAs(001) |
| Author: |
Lin, K.Y. Young, L.B. Cheng, C.K. Chen, K.H. Lin, Y.H. Wan, H.W. Cai, R.F. Lo, S.C. Li, M.Y. Kwo, J. Hong, M. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 178 (2017) nr. C pages 271-274 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 74 found articles
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