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Journal description
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Details for article 29 of 74 found articles
| Title: |
Evaluation of energy distribution of filled defects of Si oxide thin films from total photoelectron yield spectroscopy |
| Author: |
Ohta, Akio Ikeda, Mitsuhisa Makihara, Katsunori Miyazaki, Seiichi |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 178 (2017) nr. C pages 85-88 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 74 found articles
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