Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cutâ„¢ technology
Titel:
Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cutâ„¢ technology
Auteur:
Widiez, J. Rabarot, M. Saada, S. Mazellier, J.-P. Dechamp, J. Delaye, V. Roussin, J.-C. Andrieu, F. Faynot, O. Deleonibus, S. Bergonzo, P. Clavelier, L.