nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching 1 Based on `A CMOS-Compatible Device for fluid density measurements' by David Westberg, Oliver Paul, Gert I. Andersson, Henry Baltes which appeared in the Journal of Micromechanics and Microengineering, 7, 253–255, 1997. ©1997 IEEE. 1
|
Westberg, David |
|
1999 |
73 |
3 |
p. 243-251 9 p. |
artikel |
2 |
A 1024-element bulk-micromachined thermopile infrared imaging array
|
Oliver, Andrew D |
|
1999 |
73 |
3 |
p. 222-231 10 p. |
artikel |
3 |
A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process
|
Daniel, J.H. |
|
1999 |
73 |
3 |
p. 201-209 9 p. |
artikel |
4 |
A silicon micromechanical galvanometric scanner
|
Ferreira, L.O.S |
|
1999 |
73 |
3 |
p. 252-260 9 p. |
artikel |
5 |
Index
|
|
|
1999 |
73 |
3 |
p. 276- 1 p. |
artikel |
6 |
Index
|
|
|
1999 |
73 |
3 |
p. 277-279 3 p. |
artikel |
7 |
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
|
Brugger, J |
|
1999 |
73 |
3 |
p. 235-242 8 p. |
artikel |
8 |
Optical fibers with patterned ZnO/electrode coatings for flexural actuators
|
Trolier-McKinstry, S. |
|
1999 |
73 |
3 |
p. 267-274 8 p. |
artikel |
9 |
Shear axial modes in a PCTSCM
|
Lakhtakia, Akhlesh |
|
1999 |
73 |
3 |
p. 193-200 8 p. |
artikel |
10 |
The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor
|
Gongora-Rubio, M. |
|
1999 |
73 |
3 |
p. 215-221 7 p. |
artikel |
11 |
Two-coordinate position sensitive amorphous silicon photodetectors
|
Toneva, A. |
|
1999 |
73 |
3 |
p. 210-214 5 p. |
artikel |
12 |
Various applications of resonant pressure sensor chip based on 3-D micromachining
|
Harada, Kinji |
|
1999 |
73 |
3 |
p. 261-266 6 p. |
artikel |