| no |
title |
author |
magazine |
year |
volume |
issue |
page(s) |
type |
| 1 |
A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching 1 Based on `A CMOS-Compatible Device for fluid density measurements' by David Westberg, Oliver Paul, Gert I. Andersson, Henry Baltes which appeared in the Journal of Micromechanics and Microengineering, 7, 253–255, 1997. ©1997 IEEE. 1
|
Westberg, David
|
|
1999
|
73 |
3 |
p. 243-251
9 p.
|
article
|
| 2 |
A 1024-element bulk-micromachined thermopile infrared imaging array
|
Oliver, Andrew D
|
|
1999
|
73 |
3 |
p. 222-231
10 p.
|
article
|
| 3 |
A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process
|
Daniel, J.H.
|
|
1999
|
73 |
3 |
p. 201-209
9 p.
|
article
|
| 4 |
A silicon micromechanical galvanometric scanner
|
Ferreira, L.O.S
|
|
1999
|
73 |
3 |
p. 252-260
9 p.
|
article
|
| 5 |
Index
|
|
|
1999
|
73 |
3 |
p. 276-
1 p.
|
article
|
| 6 |
Index
|
|
|
1999
|
73 |
3 |
p. 277-279
3 p.
|
article
|
| 7 |
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
|
Brugger, J
|
|
1999
|
73 |
3 |
p. 235-242
8 p.
|
article
|
| 8 |
Optical fibers with patterned ZnO/electrode coatings for flexural actuators
|
Trolier-McKinstry, S.
|
|
1999
|
73 |
3 |
p. 267-274
8 p.
|
article
|
| 9 |
Shear axial modes in a PCTSCM
|
Lakhtakia, Akhlesh
|
|
1999
|
73 |
3 |
p. 193-200
8 p.
|
article
|
| 10 |
The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor
|
Gongora-Rubio, M.
|
|
1999
|
73 |
3 |
p. 215-221
7 p.
|
article
|
| 11 |
Two-coordinate position sensitive amorphous silicon photodetectors
|
Toneva, A.
|
|
1999
|
73 |
3 |
p. 210-214
5 p.
|
article
|
| 12 |
Various applications of resonant pressure sensor chip based on 3-D micromachining
|
Harada, Kinji
|
|
1999
|
73 |
3 |
p. 261-266
6 p.
|
article
|
Journal description