| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Conference calendar
|
|
|
1995
|
48 |
2 |
p. 167-168
2 p.
|
artikel
|
| 2 |
Determination of rates for orientation-dependent etching
|
Zielke, D.
|
|
1995
|
48 |
2 |
p. 151-156
6 p.
|
artikel
|
| 3 |
Fabrication and characterization of PZT thin-film vibrators for micromotors
|
Muralt, P.
|
|
1995
|
48 |
2 |
p. 157-165
9 p.
|
artikel
|
| 4 |
Frequency-output force sensor using a multimode doubly rotated quartz resonator
|
Dulmet, B.
|
|
1995
|
48 |
2 |
p. 109-116
8 p.
|
artikel
|
| 5 |
Manufacture of micromechanical scanning tunnelling microscopes for observation of the tip apex in a transmission electron microscope
|
Lutwyche, M.I.
|
|
1995
|
48 |
2 |
p. 127-136
10 p.
|
artikel
|
| 6 |
Modelling of the mechanical behaviour of a differential capacitor acceleration sensor
|
Kuehnel, Wolfgang
|
|
1995
|
48 |
2 |
p. 101-108
8 p.
|
artikel
|
| 7 |
New methods for measuring mechanical properties of thin films in micromachining: Beam pull-in voltage (V PI) method and long beam deflection (LBD) method
|
Zou, Quanbo
|
|
1995
|
48 |
2 |
p. 137-143
7 p.
|
artikel
|
| 8 |
Sensing means and sensor shells: a new method of comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors
|
Tabib-Azar, M.
|
|
1995
|
48 |
2 |
p. 87-100
14 p.
|
artikel
|
| 9 |
Three-dimensional silicon electrostatic linear microactuator
|
Tirole, N.
|
|
1995
|
48 |
2 |
p. 145-150
6 p.
|
artikel
|
| 10 |
Ultrathin single-crystalline silicon on quartz (SOQ) by 150 °C wafer bonding
|
Tong, Q.-Y.
|
|
1995
|
48 |
2 |
p. 117-123
7 p.
|
artikel
|
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