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Journal description
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Details for article 7 of 10 found articles
| Title: |
New methods for measuring mechanical properties of thin films in micromachining: Beam pull-in voltage (V PI) method and long beam deflection (LBD) method |
| Author: |
Zou, Quanbo Li, Zhijian Liu, Litian |
| Appeared in: |
Sensors and Actuators. A, Physical |
| Paging: | Volume 48 (1995) nr. 2 pages 7 p. |
| Year: |
1995 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 10 found articles
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