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Journal description
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Details for article 2 of 10 found articles
| Title: |
Determination of rates for orientation-dependent etching |
| Author: |
Zielke, D. Frühauf, J. |
| Appeared in: |
Sensors and Actuators. A, Physical |
| Paging: | Volume 48 (1995) nr. 2 pages 6 p. |
| Year: |
1995 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 2 of 10 found articles
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