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Journal description
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Details for article 126 of 187 found articles
| Title: |
Nitrogen impurity effects on nickel silicide formation at low temperatures – New “nitrogen co-plasma” approach |
| Author: |
Imbert, B. Gregoire, M. Zoll, S. Beneyton, R. Del-Medico, S. Trouiller, C. Thomas, O. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 85 (2008) nr. 10 pages 4 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 126 of 187 found articles
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