|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 125 of 187 found articles
| Title: |
New precursors for CVD copper metallization |
| Author: |
Norman, John A.T. Perez, Melanie Schulz, Stefan E. Waechtler, Thomas |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 85 (2008) nr. 10 pages 5 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 125 of 187 found articles
| << previous | next >> |