Reliability aspects of copper metallization and interconnect technology for power devices
Title:
Reliability aspects of copper metallization and interconnect technology for power devices
Author:
Hille, Frank Roth, Roman Schäffer, Carsten Schulze, Holger Heuck, Nicolas Bolowski, Daniel Guth, Karsten Ciliox, Alexander Rott, Karina Umbach, Frank Kerber, Martin