| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A new approach to integrate PLZT thin films with micro-cantilevers
|
Singh, Ravindra
|
|
|
34 |
4 |
|
artikel
|
| 2 |
A new approach to integrate PLZT thin films with micro-cantilevers
|
Singh, Ravindra
|
|
2009
|
34 |
4 |
p. 563-572
|
artikel
|
| 3 |
A novel MOEMS pressure sensor: Modelling and experimental evaluation
|
Nieva, Patricia M.
|
|
2009
|
34 |
4 |
p. 615-623
|
artikel
|
| 4 |
An X band RF MEMS switch based on silicon-on-glass architecture
|
Giridhar, M. S.
|
|
2009
|
34 |
4 |
p. 625-631
|
artikel
|
| 5 |
Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers
|
Kale, Nitin S.
|
|
2009
|
34 |
4 |
p. 591-597
|
artikel
|
| 6 |
Biomicrofluidics: Recent trends and future challenges
|
Das, Tamal
|
|
2009
|
34 |
4 |
p. 573-590
|
artikel
|
| 7 |
Composite Si/PS membrane pressure sensors with micro and macro-porous silicon
|
Sujatha, L.
|
|
2009
|
34 |
4 |
p. 643-650
|
artikel
|
| 8 |
Design and characterization of in-plane MEMS yaw rate sensor
|
Venkatesh, K. P.
|
|
2009
|
34 |
4 |
p. 633-642
|
artikel
|
| 9 |
Effect of metal coating and residual stress on the resonant frequency of MEMS resonators
|
Pandey, Ashok Kumar
|
|
2009
|
34 |
4 |
p. 651-661
|
artikel
|
| 10 |
Fabrication of polymer-based reflowed microlenses on optical fibre with control of focal length using differential coating technique
|
Ashraf, Mohammed
|
|
2009
|
34 |
4 |
p. 607-613
|
artikel
|
| 11 |
Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining
|
Bhatt, Vivekanand
|
|
2009
|
34 |
4 |
p. 557-562
|
artikel
|
| 12 |
Of light, of MEMS: Optical MEMS in telecommunications and beyond
|
Chollet, F.
|
|
2009
|
34 |
4 |
p. 599-606
|
artikel
|
| 13 |
RF sputtering: A viable tool for MEMS fabrication
|
Chandra, Sudhir
|
|
2009
|
34 |
4 |
p. 543-556
|
artikel
|
| 14 |
Sensors and packages based on LTCC and thick-film technology for severe conditions
|
Jacq, C.
|
|
2009
|
34 |
4 |
p. 677-687
|
artikel
|
| 15 |
Structure, properties, and MEMS and microelectronic applications of vanadium oxides
|
Darling, Robert B.
|
|
2009
|
34 |
4 |
p. 531-542
|
artikel
|
| 16 |
System integration design in MEMS — A case study of micromachined load cell
|
Kumar, Shishir
|
|
2009
|
34 |
4 |
p. 663-675
|
artikel
|
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