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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 13 of 16 found articles
| Title: |
RF sputtering: A viable tool for MEMS fabrication |
| Author: |
Chandra, Sudhir Bhatt, Vivekanand Singh, Ravindra |
| Appeared in: |
S¯adhan¯a |
| Paging: | Volume 34 (2009) nr. 4 pages 543-556 |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Springer-Verlag, India |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 16 found articles
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