| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
An electro-thermally driven microactuator with two dimensional motion
|
Wu, C.-T.
|
|
2002
|
8 |
1 |
p. 47-50
|
artikel
|
| 2 |
A simple method for the characterization of thin films during heat treatment
|
Pan, C. H.
|
|
2002
|
8 |
1 |
p. 63-66
|
artikel
|
| 3 |
A single crystal silicon 3 dimensional processing technique with applications in large displacement electrostatic actuation
|
Subramanian, K.
|
|
2002
|
8 |
1 |
p. 67-72
|
artikel
|
| 4 |
Cyanate ester based resin systems for snap-cure applications
|
Bauer, J.
|
|
2002
|
8 |
1 |
p. 58-62
|
artikel
|
| 5 |
Downscaling of grippers for micro assembly
|
Grutzeck, H.
|
|
2002
|
8 |
1 |
p. 27-31
|
artikel
|
| 6 |
High aspect ratio microstructures based on anisotropic porous materials
|
Müller, F.
|
|
2002
|
8 |
1 |
p. 7-9
|
artikel
|
| 7 |
Impact rebound type inertia latch for load/unload technology
|
Byun, Y.
|
|
2002
|
8 |
1 |
p. 37-40
|
artikel
|
| 8 |
Microsystem Technologies widens its scope
|
,
|
|
2002
|
8 |
1 |
p. 1-2
|
artikel
|
| 9 |
New plastification concepts for micro injection moulding
|
Michaeli, W.
|
|
2002
|
8 |
1 |
p. 55-57
|
artikel
|
| 10 |
Numerical simulation of a polysilicon thermal flexure actuator
|
Kuang, Y.
|
|
2002
|
8 |
1 |
p. 17-21
|
artikel
|
| 11 |
Polymer microfabrication technologies
|
Rötting, O.
|
|
2002
|
8 |
1 |
p. 32-36
|
artikel
|
| 12 |
Ramp loading “sweet spots”
|
Yaeger, J. R.
|
|
2002
|
8 |
1 |
p. 41-46
|
artikel
|
| 13 |
Ramp unloading “footprints”
|
Yaeger, J. R.
|
|
2002
|
8 |
1 |
p. 22-26
|
artikel
|
| 14 |
Recent developments in dimensional metrology for microsystem components
|
Cao, S.
|
|
2002
|
8 |
1 |
p. 3-6
|
artikel
|
| 15 |
Sub-micron coatings with low friction and wear for micro actuators
|
Bandorf, R.
|
|
2002
|
8 |
1 |
p. 51-54
|
artikel
|
| 16 |
The evolution of load/unload technology
|
Suk, M.
|
|
2002
|
8 |
1 |
p. 10-16
|
artikel
|
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