| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
Application of deep reactive ion etching for silicon angular rate sensor
|
Choi, J.
|
|
1996
|
2 |
4 |
p. 186-190
|
artikel
|
| 2 |
Combination of LIGA with other microstructure technologies
|
Menz, W.
|
|
1996
|
2 |
4 |
p. 162-166
|
artikel
|
| 3 |
Design and simulation of high aspect ratio motion sensors
|
Yao, L.
|
|
1996
|
2 |
4 |
p. 191-196
|
artikel
|
| 4 |
Electrochemical post-processing of LIGA structures
|
Akkaraju, S.
|
|
1996
|
2 |
4 |
p. 178-181
|
artikel
|
| 5 |
Experimental determination of mechanical properties of Ni and Ni-Fe microbars
|
Mazza, E.
|
|
1996
|
2 |
4 |
p. 197-202
|
artikel
|
| 6 |
High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography
|
Fahrenberg, J.
|
|
1996
|
2 |
4 |
p. 174-177
|
artikel
|
| 7 |
Knowledge based support for manufacturing of microstructures
|
Scherer, K. P.
|
|
1996
|
2 |
4 |
p. 167-170
|
artikel
|
| 8 |
LIGA activity in Taiwan
|
Cheng, Y.
|
|
1996
|
2 |
4 |
p. 157-161
|
artikel
|
| 9 |
Molding of LIGA microstructures from fluorinated polymers
|
Ruprecht, R.
|
|
1996
|
2 |
4 |
p. 182-185
|
artikel
|
| 10 |
The study of LIGA technique at NSRL
|
Tian, Y.
|
|
1996
|
2 |
4 |
p. 171-173
|
artikel
|
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