| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A new UV sensitive positive resist for X-ray masks manufacture
|
Voigt, Anja
|
|
2008
|
14 |
9-11 |
p. 1447-1450
|
artikel
|
| 2 |
Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices
|
Hung, Kuo-Yung
|
|
2008
|
14 |
9-11 |
p. 1217-1222
|
artikel
|
| 3 |
Application of micro structured photosensitive glass for the gravure printing process
|
Brokmann, U.
|
|
2008
|
14 |
9-11 |
p. 1635-1639
|
artikel
|
| 4 |
Applications of thick Sacrificial-Layer of zinc in LIGA process
|
Huang, XinLong
|
|
2008
|
14 |
9-11 |
p. 1257-1261
|
artikel
|
| 5 |
Aqueous base developable: easy stripping, high aspect ratio negative photoresist for optical and proton beam lithography
|
Chatzichristidi, M.
|
|
2008
|
14 |
9-11 |
p. 1423-1428
|
artikel
|
| 6 |
A Si stencil mask for deep X-ray lithography fabricated by MEMS technology
|
Mekaru, Harutaka
|
|
2007
|
14 |
9-11 |
p. 1335-1342
|
artikel
|
| 7 |
Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique
|
Park, Daniel Sang-Won
|
|
2008
|
14 |
9-11 |
p. 1429-1438
|
artikel
|
| 8 |
Commercialising HARMST-LIGA technologies
|
Tolfree, David
|
|
2008
|
14 |
9-11 |
p. 1487-1489
|
artikel
|
| 9 |
Control of the quality of laser surface texturing
|
Vincent, Christophe
|
|
2008
|
14 |
9-11 |
p. 1553-1557
|
artikel
|
| 10 |
Cylindrical coils created with 3D X-ray lithography and metallization
|
Matsumoto, Yoshifumi
|
|
2008
|
14 |
9-11 |
p. 1373-1379
|
artikel
|
| 11 |
Design and fabrication of an electrochemically actuated microvalve
|
Lee, Dong Eun
|
|
2008
|
14 |
9-11 |
p. 1751-1756
|
artikel
|
| 12 |
Design and manufacturing of micro milling tools
|
Fleischer, J.
|
|
2008
|
14 |
9-11 |
p. 1771-1775
|
artikel
|
| 13 |
De-tethering of high aspect ratio metallic and polymeric MEMS/NEMS parts for the direct pick-and-place assembly of 3D microsystem
|
Colinjivadi, Karthik S.
|
|
2008
|
14 |
9-11 |
p. 1621-1626
|
artikel
|
| 14 |
Development of lighting panel comprising light tube fabricated by LIGA process
|
Sawa, Yoshitaka
|
|
2008
|
14 |
9-11 |
p. 1559-1565
|
artikel
|
| 15 |
3-D PTFE microstructure fabricated using synchrotoron radiation etching
|
Horade, Mitsuhiro
|
|
2008
|
14 |
9-11 |
p. 1695-1698
|
artikel
|
| 16 |
Effect of applying ultrasonic vibration in thermal nanoimprint lithography
|
Mekaru, Harutaka
|
|
2007
|
14 |
9-11 |
p. 1325-1333
|
artikel
|
| 17 |
Effect of baffle height and Reynolds number on fluid mixing
|
Chung, C. K.
|
|
2007
|
14 |
9-11 |
p. 1317-1323
|
artikel
|
| 18 |
Effect of cobalt content on the work function of the electrodeposited nickel–cobalt films
|
Chung, C. K.
|
|
2008
|
14 |
9-11 |
p. 1389-1394
|
artikel
|
| 19 |
Enhancement of the adhesive force of metal films on PTFE surface achieved by fast-atom-beam surface modification
|
Utsumi, Yuichi
|
|
2008
|
14 |
9-11 |
p. 1467-1473
|
artikel
|
| 20 |
Enzyme-linked immunosorvent assay using vertical microreactor stack with microbeads
|
Ukita, Yoshiaki
|
|
2008
|
14 |
9-11 |
p. 1573-1579
|
artikel
|
| 21 |
Experimental characterization of transcription properties of microchannel geometry fabricated by injection molding based on Taguchi method
|
Kim, Dong Sung
|
|
2008
|
14 |
9-11 |
p. 1581-1588
|
artikel
|
| 22 |
Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears
|
Loechel, Bernd
|
|
2008
|
14 |
9-11 |
p. 1675-1681
|
artikel
|
| 23 |
Fabricating HARMS by using megasonic assisted electroforming
|
Liu, Gang
|
|
2008
|
14 |
9-11 |
p. 1223-1226
|
artikel
|
| 24 |
Fabrication and performance of 2-D compound X-ray refractive lenses
|
Chang, Suk-Sang
|
|
2008
|
14 |
9-11 |
p. 1657-1661
|
artikel
|
| 25 |
Fabrication and test of multilayer microcoils with a high packaging density
|
Ruffert, C.
|
|
2008
|
14 |
9-11 |
p. 1589-1592
|
artikel
|
| 26 |
Fabrication method of two-level polymeric microstructure with the help of deep X-ray lithography
|
Lee, Bong-Kee
|
|
2007
|
14 |
9-11 |
p. 1739-1744
|
artikel
|
| 27 |
Fabrication of antiscatter grids and collimators for X-ray and gamma-ray imaging by lithography and electroforming
|
Makarova, Olga V.
|
|
2008
|
14 |
9-11 |
p. 1613-1619
|
artikel
|
| 28 |
Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching
|
Kishihara, Mitsuyoshi
|
|
2008
|
14 |
9-11 |
p. 1417-1422
|
artikel
|
| 29 |
Fabrication of ceramic microcomponents and microreactor for the steam reforming of ethanol
|
Wang, Jun
|
|
2008
|
14 |
9-11 |
p. 1245-1249
|
artikel
|
| 30 |
Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
|
Dai, Wen
|
|
2008
|
14 |
9-11 |
p. 1745-1750
|
artikel
|
| 31 |
Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography
|
Liu, Longhua
|
|
2008
|
14 |
9-11 |
p. 1251-1255
|
artikel
|
| 32 |
Fabrication of large area diffraction grating using LIGA process
|
Noda, Daiji
|
|
2008
|
14 |
9-11 |
p. 1311-1315
|
artikel
|
| 33 |
Fabrication of micro sloping structures of SU-8 by substrate penetration lithography
|
Onishi, J.
|
|
2008
|
14 |
9-11 |
p. 1305-1310
|
artikel
|
| 34 |
Fabrication of the cyclical fluid channel using the surface acoustic wave actuator and continuous fluid pumping in the cyclical fluid channel
|
Fukuoka, Daisuke
|
|
2008
|
14 |
9-11 |
p. 1395-1398
|
artikel
|
| 35 |
Fast patterning microstructures using inkjet printing conformal masks
|
Lin, C.-H.
|
|
2008
|
14 |
9-11 |
p. 1263-1267
|
artikel
|
| 36 |
Femtosecond pulse laser interactions with thin silicon films and crater formation considering optical phonons and wave interference
|
Sim, Hyung Sub
|
|
2008
|
14 |
9-11 |
p. 1439-1446
|
artikel
|
| 37 |
High aspect ratio glass structures produced by means of the drawing technology
|
Hesse, A.
|
|
2008
|
14 |
9-11 |
p. 1541-1544
|
artikel
|
| 38 |
High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming
|
Tosello, G.
|
|
2008
|
14 |
9-11 |
p. 1757-1764
|
artikel
|
| 39 |
High-aspect-ratio through-hole array microfabricated in a PMMA plate for monodisperse emulsion production
|
Kobayashi, Isao
|
|
2008
|
14 |
9-11 |
p. 1349-1357
|
artikel
|
| 40 |
High efficiency mixing by the use of cross-linked micro capillary fluid filter
|
Fujiwara, K.
|
|
2008
|
14 |
9-11 |
p. 1411-1416
|
artikel
|
| 41 |
High functionality of a polymer nanocomposite material for MEMS applications
|
Dawan, Fareed
|
|
2008
|
14 |
9-11 |
p. 1451-1459
|
artikel
|
| 42 |
High sensitive immunoassay for endocrine disrupting chemicals using antibody immobilized microcapillary bundle structure
|
Utsumi, Yuichi
|
|
2008
|
14 |
9-11 |
p. 1399-1403
|
artikel
|
| 43 |
High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures
|
Yang, Ren
|
|
2008
|
14 |
9-11 |
p. 1233-1243
|
artikel
|
| 44 |
Integrated structure of PMMA microchannels for DNA separation by microchip capillary electrophoresis
|
Utsumi, Yuichi
|
|
2008
|
14 |
9-11 |
p. 1461-1466
|
artikel
|
| 45 |
Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw
|
Baron, N.
|
|
2008
|
14 |
9-11 |
p. 1475-1480
|
artikel
|
| 46 |
Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique
|
Engelke, Rainer
|
|
2008
|
14 |
9-11 |
p. 1607-1612
|
artikel
|
| 47 |
Lithography with UV-LED array for curved surface structure
|
Suzuki, S.
|
|
2008
|
14 |
9-11 |
p. 1291-1297
|
artikel
|
| 48 |
Manufacturing of microstructures with high aspect ratio by micromachining
|
Gietzelt, T.
|
|
2008
|
14 |
9-11 |
p. 1525-1529
|
artikel
|
| 49 |
Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates
|
Prokop, J.
|
|
2008
|
14 |
9-11 |
p. 1669-1674
|
artikel
|
| 50 |
Measurement of side walls of high aspect ratio microstructures
|
Simon, M.
|
|
2008
|
14 |
9-11 |
p. 1727-1729
|
artikel
|
| 51 |
Microcasting of Al bronze: influence of casting parameters on the microstructure and the mechanical properties
|
Baumeister, Gundi
|
|
2008
|
14 |
9-11 |
p. 1647-1655
|
artikel
|
| 52 |
Micro injection molding for mass production using LIGA mold inserts
|
Katoh, Takanori
|
|
2007
|
14 |
9-11 |
p. 1507-1514
|
artikel
|
| 53 |
Microlens array fabrication by backside exposure using Fraunhofer diffraction
|
Song, In-Hyouk
|
|
2007
|
14 |
9-11 |
p. 1285-1290
|
artikel
|
| 54 |
Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology
|
Shibata, Takayuki
|
|
2007
|
14 |
9-11 |
p. 1359-1365
|
artikel
|
| 55 |
Microscale molding replication of Cu- and Ni-based structures
|
Jiang, J.
|
|
2007
|
14 |
9-11 |
p. 1731-1737
|
artikel
|
| 56 |
Microstructure formation on low temperature co-fired ceramic green substrates using micro embossing
|
Shan, Xuechuan
|
|
2008
|
14 |
9-11 |
p. 1405-1409
|
artikel
|
| 57 |
Mixer slit plates fabricated by direct-LIGA
|
Bednarzik, Martin
|
|
2008
|
14 |
9-11 |
p. 1765-1770
|
artikel
|
| 58 |
Modelling of the filling of micro-cavities of finite geometry by amorphous polymers using hot-embossing
|
Sahli, M.
|
|
2008
|
14 |
9-11 |
p. 1545-1551
|
artikel
|
| 59 |
Nickel stamp fabrication and hot embossing for mass-production of micro/nano combined structures using anodic aluminum oxide
|
Park, Jang Min
|
|
2007
|
14 |
9-11 |
p. 1689-1694
|
artikel
|
| 60 |
Ni electroplating on a resist micro-machined by proton beam writing
|
Uchiya, Naoyuki
|
|
2008
|
14 |
9-11 |
p. 1537-1540
|
artikel
|
| 61 |
On the simulation of molded micro components and systems
|
Albers, Albert
|
|
2008
|
14 |
9-11 |
p. 1269-1277
|
artikel
|
| 62 |
Polyether ether ketone microstructures for chemical analytics
|
Hwang, W.
|
|
2008
|
14 |
9-11 |
p. 1699-1700
|
artikel
|
| 63 |
Polytetrafluoroethylene processing characteristics using high-energy X-ray
|
Ukita, Yoshiaki
|
|
2008
|
14 |
9-11 |
p. 1567-1572
|
artikel
|
| 64 |
Process parameter analysis in ablating micro-mold manufacturing
|
Fleischer, J.
|
|
2007
|
14 |
9-11 |
p. 1367-1372
|
artikel
|
| 65 |
Proton beam writing: a platform technology for nanowire production
|
Kan, J. A. van
|
|
2008
|
14 |
9-11 |
p. 1343-1348
|
artikel
|
| 66 |
Rapid replication of powder composite high-aspect-ratio microstructures using silicone rubber micromolds
|
Yang, Guohua
|
|
2008
|
14 |
9-11 |
p. 1663-1667
|
artikel
|
| 67 |
Reflectivity test of X-ray mirrors for deep X-ray lithography
|
Nazmov, V.
|
|
2008
|
14 |
9-11 |
p. 1299-1303
|
artikel
|
| 68 |
Replication technologies for HARM devices: status and perspectives
|
Piotter, V.
|
|
2008
|
14 |
9-11 |
p. 1599-1605
|
artikel
|
| 69 |
Resin micromachining by roller hot embossing
|
Ishizawa, Naoya
|
|
2008
|
14 |
9-11 |
p. 1381-1388
|
artikel
|
| 70 |
Shape controllable micro-nozzle fabrication
|
Kang, KyungNam
|
|
2008
|
14 |
9-11 |
p. 1641-1646
|
artikel
|
| 71 |
Sidewall slopes and roughness of SU-8 HARMST
|
Vora, K. D.
|
|
2008
|
14 |
9-11 |
p. 1777
|
artikel
|
| 72 |
Sidewall slopes and roughness of SU-8 HARMST
|
Vora, K. D.
|
|
2008
|
14 |
9-11 |
p. 1701-1708
|
artikel
|
| 73 |
Soft X-ray lithography of high aspect ratio SU8 submicron structures
|
Reznikova, Elena
|
|
2008
|
14 |
9-11 |
p. 1683-1688
|
artikel
|
| 74 |
Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007
|
Khan Malek, Chantal
|
|
2008
|
14 |
9-11 |
p. 1215-1216
|
artikel
|
| 75 |
Statistical process and measurement control for micro production
|
Lanza, G.
|
|
2007
|
14 |
9-11 |
p. 1227-1232
|
artikel
|
| 76 |
Stiction issues and actuation of RF LIGA-MEMS variable capacitors
|
Haluzan, Darcy T.
|
|
2008
|
14 |
9-11 |
p. 1709-1714
|
artikel
|
| 77 |
Stress engineering and mechanical properties of SU-8-layers for mechanical applications
|
Hammacher, J.
|
|
2008
|
14 |
9-11 |
p. 1515-1523
|
artikel
|
| 78 |
Study on demolding temperature in thermal imprint lithography via finite element analysis
|
Song, Zhichao
|
|
2008
|
14 |
9-11 |
p. 1593-1597
|
artikel
|
| 79 |
Submicron polymer structures with X-ray lithography and hot embossing
|
Mappes, Timo
|
|
2007
|
14 |
9-11 |
p. 1721-1725
|
artikel
|
| 80 |
Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off
|
Achenbach, Sven
|
|
2008
|
14 |
9-11 |
p. 1715-1719
|
artikel
|
| 81 |
The anomalous behavior and properties of Ni–Co films codeposited in the sulfamate-chloride electrolyte
|
Chung, C. K.
|
|
2007
|
14 |
9-11 |
p. 1279-1284
|
artikel
|
| 82 |
Thermal stability of electrodeposited LIGA Ni–W alloys for high temperature MEMS applications
|
Haj-Taieb, M.
|
|
2008
|
14 |
9-11 |
p. 1531-1536
|
artikel
|
| 83 |
Using bulk micromachined structures to enhance pool boiling heat transfer
|
Zhang, Min
|
|
2008
|
14 |
9-11 |
p. 1499-1505
|
artikel
|
| 84 |
Validation of micromechanical systems
|
Albers, Albert
|
|
2008
|
14 |
9-11 |
p. 1481-1485
|
artikel
|
| 85 |
Viable cell handling with high aspect ratio polymer chopstick gripper mounted on a nano precision manipulator
|
Colinjivadi, Karthik S.
|
|
2008
|
14 |
9-11 |
p. 1627-1633
|
artikel
|
| 86 |
Why you will use the deep X-ray LIG(A) technology to produce MEMS?
|
Meyer, Pascal
|
|
2007
|
14 |
9-11 |
p. 1491-1497
|
artikel
|
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