| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A contribution to the debate on the resistance–temperature characteristics of thick-film resistor materials
|
Fawcett, Nigel
|
|
2000
|
86 |
1-2 |
p. 52-57
6 p.
|
artikel
|
| 2 |
A differential capacitive low-g microaccelerometer with mg resolution
|
Tay, Francis E.H
|
|
2000
|
86 |
1-2 |
p. 45-51
7 p.
|
artikel
|
| 3 |
A laser-based 2-dimesional angular deflection measurement system for tilting microplates
|
Kim, Hoseong
|
|
2000
|
86 |
1-2 |
p. 141-147
7 p.
|
artikel
|
| 4 |
A micromachined magnetic-field sensor based on an electron tunneling displacement transducer
|
DiLella, D.
|
|
2000
|
86 |
1-2 |
p. 8-20
13 p.
|
artikel
|
| 5 |
An ANN-based smart capacitive pressure sensor in dynamic environment
|
Patra, Jagdish C.
|
|
2000
|
86 |
1-2 |
p. 26-38
13 p.
|
artikel
|
| 6 |
A single-fringe etalon silicon pressure transducer
|
Howard, D.L
|
|
2000
|
86 |
1-2 |
p. 21-25
5 p.
|
artikel
|
| 7 |
Damping of a vibrating beam
|
Hietanen, Jarmo
|
|
2000
|
86 |
1-2 |
p. 39-44
6 p.
|
artikel
|
| 8 |
Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates
|
Lee, Thomas M.H
|
|
2000
|
86 |
1-2 |
p. 103-107
5 p.
|
artikel
|
| 9 |
Editorial
|
Middelhoek, S
|
|
2000
|
86 |
1-2 |
p. 1-
1 p.
|
artikel
|
| 10 |
Effects of monolithic silicon postulated as an isotropic material on design of microstructures
|
Chen, Gin-Shin
|
|
2000
|
86 |
1-2 |
p. 108-114
7 p.
|
artikel
|
| 11 |
Elastomeric optical elements with deformable surface topographies: applications to force measurements, tunable light transmission and light focusing
|
Grzybowski, Bartosz
|
|
2000
|
86 |
1-2 |
p. 81-85
5 p.
|
artikel
|
| 12 |
Etch rates of (100), (111) and (110) single-crystal silicon in TMAH measured in situ by laser reflectance interferometry
|
Steinsland, Elin
|
|
2000
|
86 |
1-2 |
p. 73-80
8 p.
|
artikel
|
| 13 |
Fabrication of GaAs/AlGaAs high electron mobility transistors with 250 nm gates using conformal phase shift lithography
|
Hu, Junmin
|
|
2000
|
86 |
1-2 |
p. 122-126
5 p.
|
artikel
|
| 14 |
Fiber optic temperature sensor with duplex Michleson interferometric technique
|
Yuan, Li-bo
|
|
2000
|
86 |
1-2 |
p. 2-7
6 p.
|
artikel
|
| 15 |
Indirect-coupling ultraviolet-sensitive photodetector with high electrical gain, fast response, and low noise
|
Qian, F
|
|
2000
|
86 |
1-2 |
p. 66-72
7 p.
|
artikel
|
| 16 |
Microfabrication of two layer structures of electrically isolated wires using self-assembly to guide the deposition of insulating organic polymer
|
Black, Andrew J
|
|
2000
|
86 |
1-2 |
p. 96-102
7 p.
|
artikel
|
| 17 |
Micro-opto-mechanical grating switches
|
Liu, A.Q
|
|
2000
|
86 |
1-2 |
p. 127-134
8 p.
|
artikel
|
| 18 |
Miniature valveless ultrasonic pumps and mixers
|
Rife, J.C
|
|
2000
|
86 |
1-2 |
p. 135-140
6 p.
|
artikel
|
| 19 |
Shape deterioration of mesa structures in post-CMOS anisotropic etching of silicon microsensors: an experimental study
|
Takao, Hidekuni
|
|
2000
|
86 |
1-2 |
p. 115-121
7 p.
|
artikel
|
| 20 |
The effects of thermal treatment on the anisotropic etching behavior of Cz- and Fz-silicon
|
Hein, A
|
|
2000
|
86 |
1-2 |
p. 86-90
5 p.
|
artikel
|
| 21 |
Use of a shock tube in investigations of silicon micromachined piezoresistive pressure sensors
|
Stankevič, V
|
|
2000
|
86 |
1-2 |
p. 58-65
8 p.
|
artikel
|
| 22 |
Wafer bonding of silicon wafers covered with various surface layers
|
Wiegand, M
|
|
2000
|
86 |
1-2 |
p. 91-95
5 p.
|
artikel
|
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