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Journal description
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Details for article 12 of 22 found articles
| Title: |
Etch rates of (100), (111) and (110) single-crystal silicon in TMAH measured in situ by laser reflectance interferometry |
| Author: |
Steinsland, Elin Finstad, Terje Hanneborg, Anders |
| Appeared in: |
Sensors and Actuators. A, Physical |
| Paging: | Volume 86 (2000) nr. 1-2 pages 8 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 22 found articles
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