nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
1 |
A cumulative differential light-pulse detector using source-coupled MOS current switches
|
Ni, Yang |
|
1997 |
63 |
3 |
p. 205-208 4 p. |
artikel |
2 |
An IC-compatible polyimide pressure sensor with capacitive readout
|
Pedersen, M. |
|
1997 |
63 |
3 |
p. 163-168 6 p. |
artikel |
3 |
A novel micromachining technology for multilevel structures of silicon
|
Bao, Minhang |
|
1997 |
63 |
3 |
p. 217-221 5 p. |
artikel |
4 |
Author index of volume A63
|
|
|
1997 |
63 |
3 |
p. 258- 1 p. |
artikel |
5 |
Conference calendar
|
|
|
1997 |
63 |
3 |
p. 257- 1 p. |
artikel |
6 |
Etch characteristics of various materials in ethanolamine etchants
|
Linde, Harold |
|
1997 |
63 |
3 |
p. 251-254 4 p. |
artikel |
7 |
Evaluation of different adaptive filtering techniques applied to white-light interferometric sensor systems
|
Romare, D. |
|
1997 |
63 |
3 |
p. 197-203 7 p. |
artikel |
8 |
Finite-element modelling and simulation on frequency characteristics of the silicon beam resonator attached to an E-type round diaphragm for measuring the concentrated force
|
Fan, Shangchun |
|
1997 |
63 |
3 |
p. 169-176 8 p. |
artikel |
9 |
Frictional study of micromotor bearings
|
Beerschwinger, U. |
|
1997 |
63 |
3 |
p. 229-241 13 p. |
artikel |
10 |
Fully integrated thermal conductivity sensor for gas chromatography without dead volume
|
Sorge, S. |
|
1997 |
63 |
3 |
p. 191-195 5 p. |
artikel |
11 |
[No title]
|
French, P.J. |
|
1997 |
63 |
3 |
p. 255- 1 p. |
artikel |
12 |
Photo-, thermal and humidity sensitivity characteristics of Sr1−x La xTiO3 film on SiO2/Si substrate
|
Li, G.Q. |
|
1997 |
63 |
3 |
p. 223-226 4 p. |
artikel |
13 |
Subject index of volume A63
|
|
|
1997 |
63 |
3 |
p. 259-261 3 p. |
artikel |
14 |
Theoretical and experimental studies of single-chip-processed miniature silicon condenser microphone with corrugated diaphragm
|
Zou, Quanbo |
|
1997 |
63 |
3 |
p. 209-215 7 p. |
artikel |
15 |
Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes
|
Rossi, Carole |
|
1997 |
63 |
3 |
p. 183-189 7 p. |
artikel |
16 |
TMAH etching of silicon and the interaction of etching parameters
|
Thong, J.T.L. |
|
1997 |
63 |
3 |
p. 243-249 7 p. |
artikel |
17 |
White-light interferometric fiber-optic distributed strain-sensing system
|
Yuan, Libo |
|
1997 |
63 |
3 |
p. 177-181 5 p. |
artikel |