| nr |
titel |
auteur |
tijdschrift |
jaar |
jaarg. |
afl. |
pagina('s) |
type |
| 1 |
A cumulative differential light-pulse detector using source-coupled MOS current switches
|
Ni, Yang
|
|
1997
|
63 |
3 |
p. 205-208
4 p.
|
artikel
|
| 2 |
An IC-compatible polyimide pressure sensor with capacitive readout
|
Pedersen, M.
|
|
1997
|
63 |
3 |
p. 163-168
6 p.
|
artikel
|
| 3 |
A novel micromachining technology for multilevel structures of silicon
|
Bao, Minhang
|
|
1997
|
63 |
3 |
p. 217-221
5 p.
|
artikel
|
| 4 |
Author index of volume A63
|
|
|
1997
|
63 |
3 |
p. 258-
1 p.
|
artikel
|
| 5 |
Conference calendar
|
|
|
1997
|
63 |
3 |
p. 257-
1 p.
|
artikel
|
| 6 |
Etch characteristics of various materials in ethanolamine etchants
|
Linde, Harold
|
|
1997
|
63 |
3 |
p. 251-254
4 p.
|
artikel
|
| 7 |
Evaluation of different adaptive filtering techniques applied to white-light interferometric sensor systems
|
Romare, D.
|
|
1997
|
63 |
3 |
p. 197-203
7 p.
|
artikel
|
| 8 |
Finite-element modelling and simulation on frequency characteristics of the silicon beam resonator attached to an E-type round diaphragm for measuring the concentrated force
|
Fan, Shangchun
|
|
1997
|
63 |
3 |
p. 169-176
8 p.
|
artikel
|
| 9 |
Frictional study of micromotor bearings
|
Beerschwinger, U.
|
|
1997
|
63 |
3 |
p. 229-241
13 p.
|
artikel
|
| 10 |
Fully integrated thermal conductivity sensor for gas chromatography without dead volume
|
Sorge, S.
|
|
1997
|
63 |
3 |
p. 191-195
5 p.
|
artikel
|
| 11 |
[No title]
|
French, P.J.
|
|
1997
|
63 |
3 |
p. 255-
1 p.
|
artikel
|
| 12 |
Photo-, thermal and humidity sensitivity characteristics of Sr1−x La xTiO3 film on SiO2/Si substrate
|
Li, G.Q.
|
|
1997
|
63 |
3 |
p. 223-226
4 p.
|
artikel
|
| 13 |
Subject index of volume A63
|
|
|
1997
|
63 |
3 |
p. 259-261
3 p.
|
artikel
|
| 14 |
Theoretical and experimental studies of single-chip-processed miniature silicon condenser microphone with corrugated diaphragm
|
Zou, Quanbo
|
|
1997
|
63 |
3 |
p. 209-215
7 p.
|
artikel
|
| 15 |
Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes
|
Rossi, Carole
|
|
1997
|
63 |
3 |
p. 183-189
7 p.
|
artikel
|
| 16 |
TMAH etching of silicon and the interaction of etching parameters
|
Thong, J.T.L.
|
|
1997
|
63 |
3 |
p. 243-249
7 p.
|
artikel
|
| 17 |
White-light interferometric fiber-optic distributed strain-sensing system
|
Yuan, Libo
|
|
1997
|
63 |
3 |
p. 177-181
5 p.
|
artikel
|
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