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                                       Details for article 15 of 17 found articles
 
 
  Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes
 
 
Title: Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes
Author: Rossi, Carole
Scheid, Emmanuel
Estève, Daniel
Appeared in: Sensors and Actuators. A, Physical
Paging: Volume 63 (1997) nr. 3 pages 7 p.
Year: 1997
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 15 of 17 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands